CTI-Cryogenics On-Board 10F - REBUILT
Call for Price
In stock
SKU
REBUILT_OB10F
| Weight | 100 lbs |
|---|---|
| Pumping Speed | 3600 l/s |
Brooks CTI-Cryogenics On-Board 10F Vacuum Cryopump - REBUILT
The acquisition of CTI by Atlas from Brooks is named Semiconductor Chamber Solutions, through the Edwards business, headquartered in Chelmsford, USA.
Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. The On-Board Network module is included in the price.
Features
- Regenerates in half the time of a typical Cryo-Torr cryopump.
- Simultaneous regeneration capability, enabled by networking your cryopumps, to speed the overall system regeneration.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Rough pump connection | NW 25 ISO KF |
| Integrated hardware | Keypad / display (optional) Roughing valve Purge valve Cryopump TC gauge 1st stage diode 2nd stage diode 1st stage heater 2nd stage heater 2 setpoint relays RS-232 interface |
| Pumping speeds: Water Air H2 Ar |
9,000 liters/sec 3,600 liters/sec 6,000 liters/sec 3,000 liters/sec |
| Ar throughput | 1,500 sccm (19 Torr-liters/sec) |
| Capacity: Ar H2 |
2,000 std. liters 24 std. liters @ 5 x 10-6 Torr |
| Crossover | 300 Torr-liters |
| Regeneration time Full (typical) Fast (typical) |
Less than 132 minutes Less than 60 minutes |
| Weight | 100 lbs. (45 kg) |
| Type | Label | Description | Download |
|---|---|---|---|
|
Brooks CTI-Cryogenics On-Board Series - REBUILT | Installation & Maintenance Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Brooks CTI-Cryogenics On-Board 10F Vacuum Cryopump - REBUILT Please contact us for part number configurations:
| 8115874G001 | 8116103G001 | 8116103G002 | 8116155G001 | 8116156G001 | 8116226G001 | 8116243G001 | 8116243G002 |
| 8116243G003 | 8116243G004 | 8116315G001 | 8116315G002 | 8116397G001 | 8116397G002 | 8116398G001 | 8116398G002 |
| 8116408G001 | 8116408G002 |
Related Products
-
CTI-Cryogenics On-Board 10 - REBUILTCall for Price
-
CTI On-Board 10F - SERVICECall for Price
