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Edwards iH1800 - REBUILT
Weight
1110 lbs
Pumping Speed
1060 cfm
Ultimate Pressure
1 x 10-3 mbar
Edwards iH1800 Semiconductor Dry Vacuum Pump - REBUILT
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Questions? send an email to our sales team!
Peak speed
1,800 m3 h-1
1,060 cfm
30,000 l/min-1
Ultimate vacuum
1 x 10-3 mbar
7.5 x 10-4 Torr
0.1 Pa
Typical shaft seal nitrogen flow
4 slm
Inlet connection
ISO160
Outlet connection
NW40
Typical cooling water flow at 15 psi pressure drop
240 l/h-1
4 l/min-1
Weight
502 kg
Power input at ultimate
4.1 kW
Rated motor power
7.0 kW
Oil capacity
1.6 l
All figures are typical without gas ballast.
Type
Label
Description
Download
Edwards iH Series - REBUILT
Instruction Manual
Download
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards iH1800 Semiconductor Dry Vacuum Pump - REBUILT
A59040908 / A590-40-908 iH1800 460V 60Hz three-phase
A59040945 / A590-40-945 iH1800 200/208V 60Hz 3-phase
A59040946 / A590-40-946 iH1800 380/415V 50Hz 3-phase
A59040957 / A590-40-957 iH1800 230V 60Hz 3-phase
A59060945 / A590-60-945 iH1800 200/208V 50Hz 3-phase
A53318945 / A533-18-945 iH1800 Enhanced 208V 60Hz
A53325945 / A533-25-945 iH1800 HEAC 208V 60Hz
A53353945 / A533-53-945 iH1800 New Look 208V 60Hz
A59040945 / A590-40-945 iH1800 Mark V 208V 60Hz
A53318946 / A533-18-946 iH1800 Enhanced 380/415V
A53325946 / A533-25-946 iH1800 HEAC 380/415V
A53353946 / A533-53-946 iH1800 New Look 380/415V
A59040946 / A590-40-946 iH1800 Mark V 380/415V
NRC529000 / NRC5-29-000 iH1800 NRV MK5 LV
A53514945 / A535-14-945 iH1800 HTX New Look 200-208V
A53512945 / A535-12-945 iH1800 New Look 200-208V 50/60Hz
A59042946 / A590-42-946 iH1800 HTX MK5 380-460V
NRB633000 / NRB6-33-000 iH1800 PNL Cooled 200/208V 50/60Hz
