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Edwards iH600 - REBUILT
Weight
915 lbs
Pumping Speed
518 m3 /h
Ultimate Pressure
2 x 10-2 mbar
Edwards iH600 Semiconductor Dry Vacuum Pump - REBUILT
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Questions? send an email to our sales team!
Peak speed
518 m3 h-1
305 cfm
10,000 l/min-1
Ultimate Vacuum
2 x 10-3 mbar
2 x 10-1 Pa
Typical shaft seal nitrogen flow
4 slm
Inlet connection
ISO100
Outlet connection
NW40
Typical cooling water flow at 15 psi pressure drop
240 l/h-1
4 l/min-1
Weight
415 kg
Power input at ultimate
3.4 kW
Rated motor power
6.1 kW
Oil capacity
1.43 l
Specifications
Type
Label
Description
Download
BOC Edwards iH Series - REBUILT
Instruction Manual
Download
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards iH600 Semiconductor Dry Vacuum Pump - REBUILT
A59020908 / A590-20-908 iH600 MK5 460V 60Hz three-phase
A59020957 / A590-20-957 iH600 MK5 230V 60Hz 3-phase
A59020945 / A590-20-945 iH600 Mark V 208V 50/60Hz 3-phase
A59020946 / A590-20-946 iH600 Mark V 380/415V 50/60Hz 3-phase
A53382945 / A533-82-945 iH600 Enhanced System 208V 60Hz
A53382946 / A533-82-946 iH600 380/415V 50Hz
A53386945 / A533-86-945 iH600 Enhanced System 208V 60Hz
A53386946 / A533-86-946 iH600 Enhanced System 380/415V 50Hz
A53341945 / A533-41-945 iH600 HEAC 208V 60Hz
A53341946 / A533-41-946 iH600 HEAC 380/415V 50Hz
A53351945 / A533-51-945 iH600 New Look 208V 60Hz
A53351946 / A533-51-946 iH600 New Look 380/415V 50Hz
A53351908 / A533-51-908 iH600 New Look 460V 60Hz
NGV667000 / NGV6-67-000 iH600 HEAC w/ interlock 208V
NGV667300 / NGV6-67-300 iH600 NL w/ interlock 208V
NGW730000 / NGW7-30-000 iH600 MK4 208V 60Hz 3-phase
A53358945 / A533-58-945 iH600F 200-208V 50/60Hz
NRB449945 / NRB-449-945 iH600 Front Utilities
