Edwards iH600 - REBUILT
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In stock
SKU
REBUILT_iH600
| Weight | 915 lbs |
|---|---|
| Pumping Speed | 518 m3/h |
| Ultimate Pressure | 2 x 10-2 mbar |
Edwards iH600 Semiconductor Dry Vacuum Pump - REBUILT
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Peak speed | 518 m3h-1 |
| 305 cfm | |
| 10,000 l/min-1 | |
| Ultimate Vacuum | 2 x 10-3 mbar |
| 2 x 10-1 Pa | |
| Typical shaft seal nitrogen flow | 4 slm |
| Inlet connection | ISO100 |
| Outlet connection | NW40 |
| Typical cooling water flow at 15 psi pressure drop | 240 l/h-1 |
| 4 l/min-1 | |
| Weight | 415 kg |
| Power input at ultimate | 3.4 kW |
| Rated motor power | 6.1 kW |
| Oil capacity | 1.43 l |
| Type | Label | Description | Download |
|---|---|---|---|
|
BOC Edwards iH Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards iH600 Semiconductor Dry Vacuum Pump - REBUILT A59020908 / A590-20-908 iH600 MK5 460V 60Hz three-phase A59020957 / A590-20-957 iH600 MK5 230V 60Hz 3-phase A59020945 / A590-20-945 iH600 Mark V 208V 50/60Hz 3-phase A59020946 / A590-20-946 iH600 Mark V 380/415V 50/60Hz 3-phase A53382945 / A533-82-945 iH600 Enhanced System 208V 60Hz A53382946 / A533-82-946 iH600 380/415V 50Hz A53386945 / A533-86-945 iH600 Enhanced System 208V 60Hz A53386946 / A533-86-946 iH600 Enhanced System 380/415V 50Hz A53341945 / A533-41-945 iH600 HEAC 208V 60Hz A53341946 / A533-41-946 iH600 HEAC 380/415V 50Hz A53351945 / A533-51-945 iH600 New Look 208V 60Hz A53351946 / A533-51-946 iH600 New Look 380/415V 50Hz A53351908 / A533-51-908 iH600 New Look 460V 60Hz NGV667000 / NGV6-67-000 iH600 HEAC w/ interlock 208V NGV667300 / NGV6-67-300 iH600 NL w/ interlock 208V NGW730000 / NGW7-30-000 iH600 MK4 208V 60Hz 3-phase A53358945 / A533-58-945 iH600F 200-208V 50/60Hz NRB449945 / NRB-449-945 iH600 Front Utilities
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