Edwards iH80 - REBUILT
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SKU
REBUILT_iH80
| Weight | 530 lbs |
|---|---|
| Pumping Speed | 86 m3/h |
| Ultimate Pressure | 3 x 10-2 mbar |
Edwards iH80 Semiconductor Dry Vacuum Pump - REBUILT
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Peak speed | 86 m3h-1 |
| 50 cfm | |
| 10,000 l/min-1 | |
| Ultimate Vacuum | 3 x 10-2 mbar |
| 3 Pa | |
| Typical shaft seal nitrogen flow | 4 slm |
| Inlet connection | ISO100 |
| Outlet connection | NW40 |
| Typical cooling water flow at 15 psi pressure drop | 240 l/h-1 |
| 4 l/min-1 | |
| Weight | 240 kg |
| Power input at ultimate | 3.4 kW |
| Rated motor power | 6.1 kW |
| Oil capacity | 1.43 l |
| Type | Label | Description | Download |
|---|---|---|---|
|
BOC Edwards iH Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards iH80 Semiconductor Dry Vacuum Pump - REBUILT A59000908 / A590-00-908 iH80 MK5 460V 60Hz three-phase A59000945 / A590-00-945 iH80 MK5 200/208V 50/60Hz 3-phase A59000946 / A590-00-946 iH80 MK5 380/415V 50Hz 3-phase A59000957 / A590-00-957 iH80 MK5 230V 60Hz 3-phase A53381945 / A533-81-945 iH80 Enhanced System 208V 60Hz A53385945 / A533-85-945 iH80 Enhanced System 208V 60Hz A53340945 / A533-40-945 iH80 HEAC 208V 60Hz A53350945 / A533-50-945 iH80 New Look 208V 60Hz A53350908 / A533-50-908 iH80 New Look 230/460V 60Hz A59010945 / A590-10-945 iH80 Mark V 208V 60Hz A53381946 / A533-81-946 iH80 380/415V 50Hz A53385946 / A533-85-946 iH80 Enhanced System 380/415V 50Hz A53340946 / A533-40-946 iH80 HEAC 380/415V 50Hz A53350946 / A533-50-946 iH80 New Look 380/415V 50Hz A59010946 / A590-10-946 iH80 Mark V 380/415V 50Hz A59000908 / A590-00-908 iH80 Mark V 460V 099313338 A59000945 / A590-00-945 iH80 Mark V 200V 099312971 A59000908 / A590-00-908 iH80 Mark V 460V 099313666 A59000945 / A590-00-945 iH80 Mark V 360V 099312694 A59000908 / A590-00-908 iH80 Mark V 460V 099313666 A59000908 / A590-00-908 iH80 Mark V 460V 099313666
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