Edwards iH80 - REBUILT

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In stock
SKU
REBUILT_iH80
Weight 530 lbs
Pumping Speed 86 m3/h
Ultimate Pressure 3 x 10-2 mbar

Just in! Edwards iH80 Semiconductor Dry Vacuum Pump: MK5 A590-00-945 - REBUILT

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. 

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Peak speed 86 m3h-1
  50 cfm
  10,000 l/min-1
Ultimate Vacuum 3 x 10-2 mbar
  3 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO100
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop 240 l/h-1
  4 l/min-1
Weight 240 kg
Power input at ultimate 3.4 kW
Rated motor power 6.1 kW
Oil capacity 1.43 l

Specifications

Type Label Description Download
BOC Edwards iH Series - REBUILT Instruction Manual Download

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards iH80 Semiconductor Dry Vacuum Pump - REBUILT

A59000908 / A590-00-908  iH80 MK5  460V 60Hz three-phase
A59000945 / A590-00-945  iH80 MK5  200/208V 50/60Hz 3-phase
A59000946 / A590-00-946  iH80 MK5  380/415V 50Hz 3-phase
A59000957 / A590-00-957  iH80 MK5  230V 60Hz 3-phase
A53381945 / A533-81-945  iH80 Enhanced System  208V 60Hz
A53385945 / A533-85-945  iH80 Enhanced System  208V 60Hz
A53340945 / A533-40-945  iH80 HEAC  208V 60Hz
A53350945 / A533-50-945  iH80 New Look  208V 60Hz
A53350908 / A533-50-908  iH80 New Look  230/460V 60Hz
A59010945 / A590-10-945  iH80 Mark V  208V 60Hz
A53381946 / A533-81-946  iH80  380/415V 50Hz
A53385946 / A533-85-946  iH80 Enhanced System  380/415V 50Hz
A53340946 / A533-40-946  iH80 HEAC  380/415V 50Hz
A53350946 / A533-50-946  iH80 New Look  380/415V 50Hz
A59010946 / A590-10-946  iH80 Mark V  380/415V 50Hz
A59000908 / A590-00-908  iH80 Mark V  460V 099313338
A59000945 / A590-00-945  iH80 Mark V  200V 099312971
A59000908 / A590-00-908  iH80 Mark V  460V 099313666
A59000945 / A590-00-945  iH80 Mark V  360V 099312694
A59000908 / A590-00-908  iH80 Mark V  460V 099313666
A59000908 / A590-00-908  iH80 Mark V  460V 099313666