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Edwards iH80 - REBUILT
Weight
530 lbs
Pumping Speed
86 m3 /h
Ultimate Pressure
3 x 10-2 mbar
Edwards iH80 Semiconductor Dry Vacuum Pump - REBUILT
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Questions? send an email to our sales team!
Peak speed
86 m3 h-1
50 cfm
10,000 l/min-1
Ultimate Vacuum
3 x 10-2 mbar
3 Pa
Typical shaft seal nitrogen flow
4 slm
Inlet connection
ISO100
Outlet connection
NW40
Typical cooling water flow at 15 psi pressure drop
240 l/h-1
4 l/min-1
Weight
240 kg
Power input at ultimate
3.4 kW
Rated motor power
6.1 kW
Oil capacity
1.43 l
Specifications
Type
Label
Description
Download
BOC Edwards iH Series - REBUILT
Instruction Manual
Download
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards iH80 Semiconductor Dry Vacuum Pump - REBUILT
A59000908 / A590-00-908 iH80 MK5 460V 60Hz three-phase
A59000945 / A590-00-945 iH80 MK5 200/208V 50/60Hz 3-phase
A59000946 / A590-00-946 iH80 MK5 380/415V 50Hz 3-phase
A59000957 / A590-00-957 iH80 MK5 230V 60Hz 3-phase
A53381945 / A533-81-945 iH80 Enhanced System 208V 60Hz
A53385945 / A533-85-945 iH80 Enhanced System 208V 60Hz
A53340945 / A533-40-945 iH80 HEAC 208V 60Hz
A53350945 / A533-50-945 iH80 New Look 208V 60Hz
A53350908 / A533-50-908 iH80 New Look 230/460V 60Hz
A59010945 / A590-10-945 iH80 Mark V 208V 60Hz
A53381946 / A533-81-946 iH80 380/415V 50Hz
A53385946 / A533-85-946 iH80 Enhanced System 380/415V 50Hz
A53340946 / A533-40-946 iH80 HEAC 380/415V 50Hz
A53350946 / A533-50-946 iH80 New Look 380/415V 50Hz
A59010946 / A590-10-946 iH80 Mark V 380/415V 50Hz
A59000908 / A590-00-908 iH80 Mark V 460V 099313338
A59000945 / A590-00-945 iH80 Mark V 200V 099312971
A59000908 / A590-00-908 iH80 Mark V 460V 099313666
A59000945 / A590-00-945 iH80 Mark V 360V 099312694
A59000908 / A590-00-908 iH80 Mark V 460V 099313666
A59000908 / A590-00-908 iH80 Mark V 460V 099313666
