Edwards iXH610 HV - REBUILT
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In stock
SKU
REBUILT_iXH610HV
| Weight | 783 lbs |
|---|---|
| Pumping Speed | 665 m3/h |
| Ultimate Pressure | 3.7 x 10-3 Torr |
Edwards iXH610 HV Semiconductor Dry Vacuum Pump - REBUILT
Features include:
- More process capability
- Greatly increased powder handling capability and innova ve Gas BusterTM technology
- Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation
- Innovative pump seal technology to lengthen process life and reduce leakage risks
- High capacity dry pumps and boosters give an expanded process window to enhance yields
- Reduced cost of ownership
- 10% less energy consump on than the previous model
- SEMI® E54 compatible and Green Mode capable
- Longer overhaul intervals and less unscheduled down me
- Complies with key interna onal standards including UL, CE and S2
- Greatly increased hydrogen pumping speed for advanced EPI and solar processes
- Smaller footprint and lower height for ease of fi ng in any fab
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Dry pump size | 100 m3/h |
| Booster size | 600 m3/h |
| Peak speed | 665 m3/h |
| Ultimate vac (typical) | 3.7 x 10-3 Torr |
| System power at ult. | 2.6 kW |
| Inlet connection | ISO 100 |
| Outlet connection | NW 40 |
| Typical water flow | 3 l/m |
| Purge flow range | 22/44 slm |
| Weight | 355 kg |
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards iXH, iXL & pXH Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards iXH610 HV Semiconductor Dry Vacuum Pump - REBUILT ACB102121100
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