Edwards iXH610 HV - REBUILT

Edwards iXH610 HV Semiconductor Dry Vacuum Pump - REBUILT

Features include:

• More process capability
• Greatly increased powder handling capability and innova ve Gas Buster^TM technology
• Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation
• Innovative pump seal technology to lengthen process life and reduce leakage risks
• High capacity dry pumps and boosters give an expanded process window to enhance yields
• Reduced cost of ownership
• 10% less energy consump on than the previous model
• SEMI^® E54 compatible and Green Mode capable
• Longer overhaul intervals and less unscheduled down me
• Complies with key interna onal standards including UL, CE and S2
• Greatly increased hydrogen pumping speed for advanced EPI and solar processes
• Smaller footprint and lower height for ease of fi ng in any fab

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!