Edwards iXH610 HV - REBUILT

Call for Price

In stock
Weight 783 lbs
Pumping Speed 665 m3/h
Ultimate Pressure 3.7 x 10-3 Torr

Edwards iXH610 HV Semiconductor Dry Vacuum Pump - REBUILT

Features include:

  • More process capability
  • Greatly increased powder handling capability and innova ve Gas BusterTM technology
  • Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation
  • Innovative pump seal technology to lengthen process life and reduce leakage risks
  • High capacity dry pumps and boosters give an expanded process window to enhance yields
  • Reduced cost of ownership
  • 10% less energy consump on than the previous model
  • SEMI® E54 compatible and Green Mode capable
  • Longer overhaul intervals and less unscheduled down me
  • Complies with key interna onal standards including UL, CE and S2
  • Greatly increased hydrogen pumping speed for advanced EPI and solar processes
  • Smaller footprint and lower height for ease of fi ng in any fab

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Dry pump size 100 m3/h
Booster size 600 m3/h
Peak speed 665 m3/h
Ultimate vac (typical) 3.7 x 10-3 Torr
System power at ult. 2.6 kW
Inlet connection ISO 100
Outlet connection NW 40
Typical water flow 3 l/m
Purge flow range 22/44 slm
Weight 355 kg


Type Label Description Download
Edwards iXH, iXL & pXH Series - REBUILT Instruction Manual Download

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards iXH610 HV Semiconductor Dry Vacuum Pump - REBUILT