Identifying a Faulty On-Board IS Module
Introduction
With the introduction of On-Board IS and its two electronic modules: CPC Module (Communication and Power Conditioning) and AMC Module (Analog and Measurement Control), identifying which module is the cause for a cryopump failure can be a challenging task. This white paper will provide a basic understanding of the functionality contained in each module and troubleshooting tips to help facilitate the identification of the faulty module.
CPC Module Functionality:
- Communication interface for the tool, On-Board Network and AMC module
- Generates 3 phase voltage for the variable speed motor and controls the speed of the motor from 44-144 RPM
- Contains the application code for controlling and monitoring valves, heaters, temperature readings, temperature control, regeneration and Heater Fault Interrupt (HFI)
- Provides 208 VAC to power the AMC Module
AMC Module Functionality:
- Receives commands from the CPC to perform the following:
- Reads the 1st and 2nd stage temperatures
- Reads the TC Pressure
- Perform temperature control:
- 1st stage temperature for PVD Cryopumps
- 1st and 2nd stage temperature control for Implant Cryopumps
- Store/retrieve User and Factory programmable valves in NVRAM
- Performs the following functions:
- Excitation current for reading the 1st and 2nd stage temperature sensors and TC Gauge
- Controls the heater voltage for the 1st and 2nd stage heaters
- Provides 24VDC for enabling the cryopump valves
- Senses leakage currents through the 1st and 2nd stage heaters
- Provides 24VDC to power the CPC module
- Stores the following into NVRAM
- Diode curves for the 1st and 2nd stage temperature sensors
- Cryopump serial number
- Senses motor temperature
- Senses gate valve position and control for Implant Cryopumps
Module Interface Schematic:
Identified in Figure 1 is a block diagram of the CPC/AMC Modules and IntelliPurge PCB. The diagram identifies the interfaces between the CPC/AMC Modules and IntelliPurge PCB connections to the cryopump and user interface. This diagram in conjunction with Tables 1-3 are an excellent source of identifying a potentially defective module.
Figure 1 - On-Board IS Module Interface Connections
Table 1 - CPC Module LED Status
| Status LED I | Motor Power and Temperature Control Status |
|---|---|
| OFF | Motor is OFF |
| GREEN | Motor ON - Temperature Control is enabled |
| AMBER | Motor OFF - Temperature Control is not enabled |
| Status LED II | Regeneration Status |
|---|---|
| OFF | Regeneration is Idle |
| GREEN | Full Regeneration is executing |
| AMBER | Fast Regeneration is executing |
| Status LED III | CPC Power, Communication and HFI Status |
|---|---|
| OFF | No Power to the CPC |
| SOLID GREEN | CPC Power ON, No Network Communications |
| BLINKING GREEN | CPC Power ON, Network Communicating |
| SOLID AMBER | CPC Power ON, No Network Communications, HFI Fault |
| BLINKING AMBER | CPC Power ON, Network Communicating, HFI Fault |
Table 2 - IntelliPurge LED Status
| LED | IntelliPurge |
|---|---|
| Power | Green Power On - Off No Power |
| Enabled | Green when UPS is fully Charged |
| Service | Red when Service is Required |
Table 3 - Troubleshooting Guide
| On-Board IS Module Troubleshooting Guide | ||
| Problem | Possible Cause/Symptom | Possible Corrective Action |
|---|---|---|
| Temperature Control not working | 1. Status LED I is Amber 2. Status LED III blinking or Solid Amber 3. Status LED I & III are Green 4. Heater not working |
1. Enable Temperature Control 2. Reset HFI Fault 3. Power Cycle cryopump a. Replace AMC Module 4. Replace AMC Module a. Replace Cryopump |
| Purge/Rough/Vents values not working | 1. No 24VDC | 1. Power Cycle Cryopump a. Replace AMC Module |
| Motor will not turn ON | 1. Status LED I is OFF a. Faulty CPC Module b. Faulty Motor |
1. Check Input AC Power a. Replace CPC Module b. Replace Cryopump |
| Remote Display will not turn ON | 1. No 5VDC | 1. Power Cycle Cryopump a. Replace CPC Module |
| Cryopump is not recognized by the Tool Controller | 1. On-Board Network Problem | 1. Verify Cryopump Network Address is set properly a. Power Cycle Cryopump b. Replace CPC Module |
| Temperature reading “OPN” or “SHO” | 1. Cable disconnected 2. No excitation current |
1. Verify cable is connected 2. Power Cycle Cryopump a. Replace AMC |
| CPC LED’s I, II, II are OFF | 1. No AC Input Power to the CPC 2. No DC power to the CPC |
1. Verify 208VAC input power 2. Replace AMC Module |
| Gate Valve Failure | 3. Cable disconnected 4. IntelliPurge error 5. AMC error |
3. Verify cable is connected 4. Replace Cryopump 5. Replace AMC Module |
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