Pfeiffer TMH 521 - REBUILT
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| Weight | 20 lbs |
|---|---|
| Pumping Speed | 480-500 l/s |
| Ultimate Pressure | 1 x 10-10 mbar |
Pfeiffer Vacuum TMH 521 Turbomolecular Pump - REBUILT
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| Specifications | TMH 521 | |||
|---|---|---|---|---|
| Inlet | DN 100 ISO-K | DN 160 ISO-K | ||
| Outlet | DN 25 ISO-KF/G 1/4" | |||
| Venting connection | G 1/8” | |||
| Nominal rotation speed | 50,000 l/min | |||
| Standby rotation speed | 33,000 l/min | |||
| Start-up time | 5.5 min | |||
| Noise level | < 50 dB(A) | |||
| Final pressure, backing pump | < 5 mbar | |||
| Maximum permissible rotor temperature | 90°C | |||
| Permissible heat radiation power | 14 W | |||
| Volume flow rate for: | ||||
| N2 | 300 l/s | 500 l/s | ||
| He | 400 l/s | 500 l/s | ||
| H2 | 400 l/s | 480 l/s | ||
| Compression ratio for: | ||||
| N2 | > 1012 | |||
| He | 5 x 107 | |||
| H2 | 5 x 106 | |||
| Maximum fore-vacuum pressure | ||||
| N2 | 16 mbar | |||
| He | 14 mbar | |||
| H2 | 7 mbar | |||
| Maximum gas throughput w/ water cooling 1) | ||||
| N2 | 3 mbar l/s | |||
| He | 4 mbar l/s | |||
| Vertex power characteristics line 2) | ||||
| A | 185 W / 833 Hz | |||
| B | 260 W / 485 Hz | |||
| C | 160 W / 833 Hz | |||
| D | 260 W / 435 Hz | |||
| Final pressure 3) | ||||
| w/ diaphragm vacuum pump | < 1 x 10-8 mbar | |||
| w/ rotary vane vacuum pump | < 5 x 10-10 mbar | |||
| Lubricant | TL 011 | |||
| Max cooling water consumption w/ water at 15°C 4) | 100 l/h | |||
| Cooling water temperature | 5 - 25°C | |||
| Permissible ambient temperature w/ air cooling | 0 - 35°C | |||
| Heating power consumption | 100 W | |||
| Weight | 13 kg | 13.5 kg | ||
| Permissible magnetic field | 5.0 mT | |||
| Operating voltage | 72 ± 5% VDC | |||
| Duration 4) - / max. current consumption | 3.2 / 4.2 A | |||
| Duration 4) - / max. power | 230 / 300 W | |||
| Protection class 5) | IP 30 | |||
| Relative humidity |
5 - 85% non-condensing
|
|||
1) Measured with a rotary vane pump 1.5 m3/h; higher throughputs with reduced rotation speed.
2) For gas type characteristic lines please refer to section 4.4.
3) In accordance with German Industrial Standard 28428 the final pressure which is attained in a measuring dome 48 hours after baking out.
4) At maximum gas throughput.
5) Protection class IP 54 is afforded for the Electronic Drive Unit TC 600 by refro-fitting a cover plate.
| Type | Label | Description | Download |
|---|---|---|---|
|
Pfeiffer TMH / TMU 521 - REBUILT | Operating Instructions | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Pfeiffer Vacuum TMH 521 Turbomolecular Pump - REBUILT PMP02840G / PM P02 840 G TMH 521 DN 160 ISO-K PMP02853C / PM P02 853 C TMH 521 U P DN 160 ISO-K PMP03552C / PM P03 552 C TMH 521 Y P DN 160 ISO-K
