The Varian Turbo-V 2K-G turbo pump is a dedicated pumping system designed for the Plasma process industry. Its pumping stages and pump structure are optimized to work with very high Ar gas flows and temperatures. The 2K-G is the first pump to fully integrate both purge and vent valves into the pump casing. They are actuated directly by the integrated electronics and nothing hangs out of the pump. They are protected from external shocks and contamination, granting for maximum lifetime. View our inventory of Varian turbo pumps.
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5 x 10-8 mbar (4 x 10-8 Torr) (According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a turbopump fitted with a ISO-250 flange and using the recommended pre-vacuum pump)
Inlet flange
ISO-250F
Foreline flange
KF-40 NW
Nominal rotational speed
33,000 rpm
Start up time
< 7 minutes
Recommended forepump
> 40 m3/h
Operating position
Any
Operating ambient temperature
5°C to 40°C
Maximum flange temperature
no process: 80°C process: 50°C
Max rotor temperature
120°C
Vibration level (displacement)
< 0.01 μm at inlet flange
Cooling requirements
Water
Coolant water
Minimum flow: 200 l/h (0.89 GPM) Temperature: +10°C to +35°C Pressure: 3 to 5 bar (45 to 75 psi)
Noise level
< 45 dB(A) at 1 meter
Power supply Input voltage Input freq. Max input power Stand-by power Max operating power
208 – 240 VAC 50 – 60 Hz 850 VA 30 to 35 W 400 W for Nitrogen and lighter gases 390 W for Argon
Protection fuse
2 x 8 A
Compliance with
EN 55011 (Radio disturbance characteristics) EN 61000-3-2 (Limits for harmonic current emissions) EN 61000-3-3 (Limitation of voltage changes, voltage fluctuations and flicker) EN 61000-6-2 and EN 61326 (Immunity for industrial environments) which recall: EN 61000-4-2 (Electrostatic discharge phenomena) EN 61000-4-3 (Radiated high-frequency phenomena) EN 61000-4-4, EN 61000-4-5, EN61000-4-6 (Conducted high-frequency phenomena) EN 61000-4-11 (Voltage fluctuation, voltage dips and short interruptions)
Installation Category
II
Pollution Degree
2
Max altitude
2,000 m MSL
Power cable
w/ European or NEMA plug 3 meters long (optional)
Serial communication kit
RS232 cable w/ a 9-pin D type male connector and a 9- pin D type female connector, and Navigator software (optional)
