CTI-Cryogenics On-Board 6 - REBUILT
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In stock
SKU
REBUILT_OB6
| Weight | 55 lbs |
|---|---|
| Pumping Speed | 800 l/s |
Brooks CTI-Cryogenics On-Board 6 Vacuum Cryopump - REBUILT
The acquisition of CTI by Atlas from Brooks is named Semiconductor Chamber Solutions, through the Edwards business, headquartered in Chelmsford, USA.
Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. The On-Board Network module is included in the price.
Features
- Regenerates in half the time of a typical Cryo-Torr cryopump.
- Simultaneous regeneration capability, enabled by networking your cryopumps, to speed the overall system regeneration.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Rough pump connection | NW 25 ISO KF |
| Purge gas connection | VCR-4 female nut |
| Integrated hardware | Keypad / display (optional) Roughing valve Purge valve Cryopump TC gauge 1st stage diode 2nd stage diode 1st stage heater 2nd stage heater 2 setpoint relays RS-232 interface |
| Pumping speeds Water Air H2 Ar |
2,500 liters/sec 800 liters/sec 1,200 liters/sec 650 liters/sec |
| Ar throughput | 700 sccm (9 Torr-liters/sec) |
| Capacity Ar H2 |
500 std. liters (no recovery metric) 9 std. liters @ 5 x 10-6 Torr |
| Crossover | 100 Torr-liters |
| Regeneration Time Full (typical) Fast (typical) |
Less than 162 minutes Less than 60 minutes |
| Weight | 55 lbs. (25 kg) |
| Type | Label | Description | Download |
|---|---|---|---|
|
Brooks CTI-Cryogenics On-Board Series - REBUILT | Installation & Maintenance Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Brooks CTI-Cryogenics On-Board 6 Vacuum Cryopump - REBUILT Please contact us for part number configurations:
8116095G001 8116095G002
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