CTI-Cryogenics On-Board 6 - REBUILT
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| Weight | 55 lbs |
|---|---|
| Pumping Speed | 800 l/s |
Brooks CTI-Cryogenics On-Board 6 Vacuum Cryopump - REBUILT
The acquisition of CTI by Atlas from Brooks is named Semiconductor Chamber Solutions, through the Edwards business, headquartered in Chelmsford, USA.
Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. The On-Board Network module is included in the price.
Features
- Regenerates in half the time of a typical Cryo-Torr cryopump.
- Simultaneous regeneration capability, enabled by networking your cryopumps, to speed the overall system regeneration.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
This product has been refurbished by PTB Sales, Inc. PTB Sales is not affiliated with Brooks Automation, Inc., the Original Equipment Manufacturer. In some cases, PTB Sales uses processes and parts that are different from those used by the OEM, and the OEM expressly disclaims any warranty obligations with respect to this refurbished product.
| Rough pump connection | NW 25 ISO KF |
| Purge gas connection | VCR-4 female nut |
| Integrated hardware | Keypad / display (optional) Roughing valve Purge valve Cryopump TC gauge 1st stage diode 2nd stage diode 1st stage heater 2nd stage heater 2 setpoint relays RS-232 interface |
| Pumping speeds Water Air H2 Ar |
2,500 liters/sec 800 liters/sec 1,200 liters/sec 650 liters/sec |
| Ar throughput | 700 sccm (9 Torr-liters/sec) |
| Capacity Ar H2 |
500 std. liters (no recovery metric) 9 std. liters @ 5 x 10-6 Torr |
| Crossover | 100 Torr-liters |
| Regeneration Time Full (typical) Fast (typical) |
Less than 162 minutes Less than 60 minutes |
| Weight | 55 lbs. (25 kg) |
This product has been refurbished by PTB Sales
| Type | Label | Description | Download |
|---|---|---|---|
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Brooks CTI-Cryogenics On-Board Series - REBUILT | Installation & Maintenance Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Brooks CTI-Cryogenics On-Board 6 Vacuum Cryopump - REBUILT Please contact us for part number configurations:
8116095G001 8116095G002
This product has been refurbished by PTB Sales, Inc. PTB Sales is not affiliated with Brooks Automation, Inc., the Original Equipment Manufacturer. In some cases, PTB Sales uses processes and parts that are different from those used by the OEM, and the OEM expressly disclaims any warranty obligations with respect to this refurbished product.
