EBARA A10S - REBUILT
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In stock
SKU
REBUILT_A10S
| Weight | 485 lbs |
|---|---|
| Pumping Speed | 42.38 cfm |
| Ultimate Pressure | 3 x 10-2 torr |
EBARA A10S Multi-Stage Dry Vacuum Pump - REBUILT
Technical Characteristics
- Complete pump safeguard system
- High pump operating temperature preventing condensation
- Low noise and low vibration
- Corrosion resistant materials-stainless steel coolers, water circuits
- High reliability even for harsh processes
- Efficient interstage coolers for LPCVD nitride process
- Canned motor
- Low service requirements
- Control panel for monitoring operating conditions
Customer Benefits
- Very low nitrogen consumption for purging
- Clean room compatible
- Low service requirements
- Compact size and small footprint
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Model | A25S | A10S | A07V | |
|---|---|---|---|---|
| Pumping speed (50 / 60 Hz) | 2,500 / 3,000 L/min | 1,000 / 1,200 L/min | 700 / 840 L/min | |
| Ultimate pressure (50 / 60 Hz) | 5.3 / 4.0Pa | 1.1 / 1.0 Pa | ||
| Connection | Gas inlet | NW50 | NW40 | |
| Gas outlet | NW40 | |||
| Motor | 2P 3.7 kW | 2P 2.2 kW | 2P 1.5 kW | |
| Cooling water | Connection | Coupler (Rc 3/8) | ||
| Pressure [gauge press.] | Supply: Max. 0.4 MPa, Differential press.: Min. 0.1 MPa | |||
| Flow rate | Min. 3.5 L/min | |||
| Temperature | Max. 30°C | |||
| N2 Gas | Connection | 1/4” tube fitting (same as Swagelok®) | ||
| Pressure [gauge press.] | Supply: 0.1-0.7 MPa, Setting: 0.04-0.07 MPa | |||
| Approx. flow rate | 17-20 Pa m3/s [3.4 Pa m3/s] | 15-19 Pa m3/s [3.4 Pa m3/s] | ||
| Duct ventilation | Connection | d50 mm x L50 mm | d50 mm x L60 mm | |
| Pressure | -196 Pa | |||
| Approx. flow rate | 0.5 m3/min | |||
| Lubrication Oil | Brand | FOMBLIN Y-L VAC 25/6 BARRIERTA J100 DEMNUM S-65 KRYTOX VPF 1525 | ||
| Quantity | 0.4 L | 0.5 L | ||
| Approx. weight | 240 kg | 220 kg | 150 kg | |
| Power supply | Phase/volt/freq. | 3 Phase, 200V (50 Hz), 200-220 V (60Hz) | ||
| Current rating (50 / 60 Hz) | 18.3 / 17.5 A | 11.7 / 11.1 A | 8.4 / 8.6 A | |
| Connection | MS Series 22-22 | MS Series 20-4 | ||
| (Japan Aviation Electronics Industry) | ||||
| Control signal | 57 Series 50 (DDK. Ltd) | |||
| Type | Label | Description | Download |
|---|---|---|---|
|
EBARA A Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
EBARA A10S Multi-Stage Dry Vacuum Pump - REBUILT
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