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EBARA A10S - REBUILT
| Weight |
485 lbs |
| Pumping Speed |
42.38 cfm |
| Ultimate Pressure |
3 x 10-2 torr |
EBARA A10S Multi-Stage Dry Vacuum Pump - REBUILT
Technical Characteristics
- Complete pump safeguard system
- High pump operating temperature preventing condensation
- Low noise and low vibration
- Corrosion resistant materials-stainless steel coolers, water circuits
- High reliability even for harsh processes
- Efficient interstage coolers for LPCVD nitride process
- Canned motor
- Low service requirements
- Control panel for monitoring operating conditions
Customer Benefits
- Very low nitrogen consumption for purging
- Clean room compatible
- Low service requirements
- Compact size and small footprint
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Model |
A25S |
A10S |
A07V |
| Pumping speed (50 / 60 Hz) |
2,500 / 3,000 L/min |
1,000 / 1,200 L/min |
700 / 840 L/min |
| Ultimate pressure (50 / 60 Hz) |
5.3 / 4.0Pa |
1.1 / 1.0 Pa |
| Connection |
Gas inlet |
NW50 |
NW40 |
| Gas outlet |
NW40 |
| Motor |
2P 3.7 kW |
2P 2.2 kW |
2P 1.5 kW |
| Cooling water |
Connection |
Coupler (Rc 3/8) |
| Pressure [gauge press.] |
Supply: Max. 0.4 MPa, Differential press.: Min. 0.1 MPa |
| Flow rate |
Min. 3.5 L/min |
| Temperature |
Max. 30°C |
| N2 Gas |
Connection |
1/4” tube fitting (same as Swagelok®) |
| Pressure [gauge press.] |
Supply: 0.1-0.7 MPa, Setting: 0.04-0.07 MPa |
| Approx. flow rate |
17-20 Pa m3/s [3.4 Pa m3/s] |
15-19 Pa m3/s [3.4 Pa m3/s] |
| Duct ventilation |
Connection |
d50 mm x L50 mm |
d50 mm x L60 mm |
| Pressure |
-196 Pa |
| Approx. flow rate |
0.5 m3/min |
| Lubrication Oil |
Brand |
FOMBLIN Y-L VAC 25/6 BARRIERTA J100 DEMNUM S-65 KRYTOX VPF 1525 |
| Quantity |
0.4 L |
0.5 L |
| Approx. weight |
240 kg |
220 kg |
150 kg |
| Power supply |
Phase/volt/freq. |
3 Phase, 200V (50 Hz), 200-220 V (60Hz) |
| Current rating (50 / 60 Hz) |
18.3 / 17.5 A |
11.7 / 11.1 A |
8.4 / 8.6 A |
| Connection |
MS Series 22-22 |
MS Series 20-4 |
| (Japan Aviation Electronics Industry) |
| Control signal |
57 Series 50 (DDK. Ltd) |
Specifications
| Type |
Label |
Description |
Download |
|
|
EBARA A Series - REBUILT |
Instruction Manual |
Download
|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
EBARA A10S Multi-Stage Dry Vacuum Pump - REBUILT
