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EBARA A30W - REBUILT

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SKU

REBUILT_A30W

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Weight	728 lbs
Pumping Speed	127.13 cfm
Ultimate Pressure	2.25 x 10^-3 torr

EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT

Technical Characteristics

Complete pump safeguard system
High pump operating temperature preventing condensation
Low noise and low vibration
Corrosion resistant materials-stainless steel coolers, water circuits
High reliability even for harsh processes
Efficient interstage coolers for LPCVD nitride process
Canned motor
Low service requirements
Control panel for monitoring operating conditions

Customer Benefits

Very low nitrogen consumption for purging
Clean room compatible
Low service requirements
Compact size and small footprint

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Pumping speed (N₂) 50/60 Hz	3,000 / 3,600 l/min
Pumping speed (N₂) 50/60 Hz	180 / 216 m³/h
Ultimate pressure 50/60 Hz	4 x 10^-3 / 3 x 10^-3mbar
Ultimate pressure 50/60 Hz	0.4 / 0.3 Pa
Water consumption	3.5 l/min
Nitrogen consumption	10-13 slm
Nitrogen consumption	17-22 Pa m³/sec
Voltages ranges	200-220/380-415 V
Motor power, installed	1.5+2.2 kW
Weight, approx.	330 kg
Dimensions	895 x 400 x 485 mm
Inlet flange size	DN 50 KF
Outlet flange size	DN 40 KF

Specifications

Digital Manuals

Type	Label	Description	Download
	EBARA A Series - REBUILT	Instruction Manual	Download

RFQ/Configuration

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT