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EBARA A30W - REBUILT
| Weight |
728 lbs |
| Pumping Speed |
127.13 cfm |
| Ultimate Pressure |
2.25 x 10-3 torr |
EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT
Technical Characteristics
- Complete pump safeguard system
- High pump operating temperature preventing condensation
- Low noise and low vibration
- Corrosion resistant materials-stainless steel coolers, water circuits
- High reliability even for harsh processes
- Efficient interstage coolers for LPCVD nitride process
- Canned motor
- Low service requirements
- Control panel for monitoring operating conditions
Customer Benefits
- Very low nitrogen consumption for purging
- Clean room compatible
- Low service requirements
- Compact size and small footprint
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Pumping speed (N2) 50/60 Hz |
3,000 / 3,600 l/min |
| Pumping speed (N2) 50/60 Hz |
180 / 216 m3/h |
| Ultimate pressure 50/60 Hz |
4 x 10-3 / 3 x 10-3 mbar |
| Ultimate pressure 50/60 Hz |
0.4 / 0.3 Pa |
| Water consumption |
3.5 l/min |
| Nitrogen consumption |
10-13 slm |
| Nitrogen consumption |
17-22 Pa m3/sec |
| Voltages ranges |
200-220/380-415 V |
| Motor power, installed |
1.5+2.2 kW |
| Weight, approx. |
330 kg |
| Dimensions |
895 x 400 x 485 mm |
| Inlet flange size |
DN 50 KF |
| Outlet flange size |
DN 40 KF |
Specifications
| Type |
Label |
Description |
Download |
|
|
EBARA A Series - REBUILT |
Instruction Manual |
Download
|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT
