EBARA EMT397 Mag Lev - NEW
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| Weight | 42 lbs |
|---|---|
| Pumping Speed | 340 l/s |
| Ultimate Pressure | < 7.5 X 10-9 |
EBARA EMT397 Magnetically Levitated Turbo Vacuum Pump - NEW
The Model EMT397 series are magnetically levitated bearing compound turbomolecular pumps. The Model EMT397 series offer highly efficient, cost-effective solutions that provide clean and reliable vacuum generation for your high vacuum applications.
Each model in the Model EMT397 range offers exceptional value and is equipped with the latest active maglev technology for years of reliable trouble-free operation. Many maglev turbos are still in the field after 20 years operation. Our robust design can withstand infrequent shock treatment during high flow or vent conditions and the special coating of corrosive resistant models can handle the harshest chemistries. Improved rotor efficiency results in higher pumping speeds and gas compression. This accommodates higher foreline pressures making them ideal for multiple applications including semiconductor processes, in line coaters, UHV, beamlines and analytical systems.
All EBARA EMT series maglev turbomolecular pumps are available with optional water or fan cooling and various flange configurations ISO-K, ISO-F, and Conflat.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Models | EMT397 | EMT427 | EMT907 | EMT1307 | EMT2400 |
| Pumping speed N2 (l/s) | 340 | 400 | 900 | 1,300 | 2,400 |
| Ultimate pressure (Torr) | < 7.5 X 10-9 | ||||
| Recommended backing pump (l/min) | 250 | 500 | |||
| Inlet flange diameter | DN100 | DN160 | DN200 | DN250 | |
| Throughput N2 (sccm) | 2,000 | 3,000 | |||
| Startup time (min) | < 3 | < 5 | |||
| Stop time (min) | < 5 | ||||
| Height in mm | 288 - 294 | 250 - 255 | 401 - 407 | 349 - 410 | 340 |
| Size in mm (diameter) | Ø186 | Ø180 | Ø264 | Ø310 | |
| Weight in kg | 16 - 19 | 37 - 45 | 45 | ||
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
EBARA EMT397 Magnetically Levitated Turbomolecular Vacuum Pump - NEW EMT397MBAB ISO-F100 inlet, air cooled (fan) EMT397MBAC ISO-F100 inlet, corrosive resistant, air cooled (fan) EMT397MBWB ISO-F100 inlet, water cooled EMT397MBWC ISO-F100 inlet, corrosive resistant, water cooled EMT397MCAB CF100 inlet, air cooled (fan) EMT397MCAC CF100 inlet, corrosive resistant, air cooled (fan) EMT397MCWB CF100 inlet, water cooled EMT397MCWC CF100 inlet, corrosive resistant, water cooled EMT397MIRWC ISO-K100 inlet, corrosive resistant, heated, water cooled EMT397MRAB ISO-K100 inlet, air cooled (fan) EMT397MRAC ISO-K100 inlet, corrosive resistant, air cooled (fan) EMT397MRWB ISO-K100 inlet, water cooled EMT397MRWC ISO-K100 inlet, corrosive resistant, water cooled
