EBARA ESR200WN - REBUILT
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SKU
REBUILT_ESR200WN
| Weight | 400 lbs |
|---|---|
| Pumping Speed | 300 cfm |
| Ultimate Pressure | 1.5 x 10-3 Torr |
EBARA ESR200WN Light Duty Dry Semiconductor Vacuum Pump - REBUILT
The ESR Series (Energy Saving Roots) are multistage dry vacuum pump engineered for application from clean to medium duty processes such as Load Lock, SEM, PVD, Ashing, Sputtering and Etch. The ESR Series covers a wide pumping speed range from 35 ~ 1,625 cfm with an ultimate pressure as low as 1 mTorr.
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EBARA ESR200WN Light Duty Dry Semiconductor Vacuum Pump - REBUILT
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