Edwards EPX500NE - REBUILT
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| Weight | 100 lbs |
|---|---|
| Pumping Speed | 500 m3/h |
| Ultimate Pressure | < 1 x 10-6 mbar |
Edwards EPX500NE Semiconductor Dry Vacuum Pump - REBUILT
The EPX Series offers on-tool pumping in a lighter and smaller package, requiring only 1.4 kilowatts of power. Using a unique, patented, single-shaft regenerative/ Holweck® stage mechanism, EPX pumps are capable of pumping from atmosphere to ultimate pressures of <7 x 10-7 Torr.
Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated electronics also provide simple communication connections to the process tool.
The EPX Series supports clean and light duty semiconductor processing applications such as ash/strip and implant end station applications
| Peak Speed | 500 m3h-1 / 295 ft3min-1 / 8,338 lmin-1 |
| Ultimate Vacuum | < 1 x 10-6 mbar / < 7 x 10-7 Torr / < 1 x 10-4 Pa |
| Warm up time (to nominal performance) | 30 min |
| Inlet Flange | ISO160 |
| Outlet flange | NW25 |
| Noise | < 59 dB(A) |
| Minimum cooling water flow rate | 2 lmin-1 |
| Cooling water temperature | 15 - 35°C |
| Nitrogen supply interface | 1/4 in (6.5 mm) tube |
| Nitrogen supply pressure | 3 x 105 - 7 x 105 pa |
| Minimum nitrogen purity | 99.95% |
| Electrical supply | 200/208 V, 50/60 Hz 3-phase |
| Power at ultimate | 1.4 kW |
| Rated motor power | 3.0 kW |
| TIM | None |
| Weight | 45.2 kg |
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards EPX HiVac Series | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards EPX500NE Semiconductor Dry Vacuum Pump - REBUILT A41954012 / A41954012 EPX500NE 208V No TIM 3/8 water connector A41954014 / A41954014 EPX500NE 400V No TIM 3/8 water connector A41954022 / A41954022 EPX500NE 208V No TIM 1/4 water connector A41954212 / A41954212 EPX500NE 208V SPI TIM 3/8 water connector A41954224 / A41954224 EPX500NE 400V SPI TIM 1/4 water connectors A41954412 / A41954412 EPX500NE 208V TEL TIM 3/8 water connector A41954414 / A41954414 EPX500NE 400V TEL TIM 3/8 water connectors A41954424 / A41954424 EPX500NE 400V TEL TIM 1/4 water connectors A41954512 / A41954512 EPX500NE 208V LAM TIM 3/8 water connector A41954712 / A41954712 EPX500NE 208V MCM TIM 3/8 water connector A41954714 / A41954714 EPX500NE 400V MCM TIM 3/8 water connectors
OBSOLETED A40902977 / A409-02-977 IPX100 A40902973 / A409-02-973 IPX100 A40904977 / A409-04-977 IPX100A A40904973 / A409-04-973 IPX100A A40924977 / A409-24-977 IPX180A A40924973 / A409-24-973 IPX180A A40914977 / A409-14-977 IPX500A A40914973 / A409-14-973 IPX500A
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