The Edwards EXT turbomolecular and compound molecular pumps provide a reliable, hydrocarbon-free high and ultra high vacuum. Utilizing multi-stage axial flow turbines combined with magnetic and ceramic bearings, the EXT design provides oil and vibration free operation with minimal maintenance on high critical foreline pressure processes.
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Max continuous inlet pressure (light gas pumping)†
Water cooling (water at 15°C, ambient temp at 40°C)
2 × 10-2 mbar
Forced air cooled, 35°C ambient
1 × 10-2 mbar
Pump rotational speed
Nominal rotational speed
90,000 rpm
Standby rotational speed
Variable from 49,500 to 90,000 rpm (63,000 rpm default)
Programmable power limit settings
Variable from 50-120W (80W default)
Start time to 90% speed
110 s ‡
Analogue outputs
Rotational speed; Power consumption; Pump temp; Controller temp
Cooling method#
Forced air / water
Ambient air temperature for forced air cooling
5 - 35°C
Min cooling water flow rate (water 15°C)
15 l h-1
Water temp range
10 - 20°C
Max inlet flange temp
100°C
Operating attitude
Vertical and upright, through to Horizontal
Noise level at 1 metre
< 50 dB(A)
Max magnetic field pump can tolerate
5 mT
Recommended controller
TIC 100 turbo and instrument controller
Quiescent electrical power
10 W
* A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate < 5 mbar may also be used e.g. XDD1. † Above this inlet pressure
