Edwards iF1800 - REBUILT
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SKU
REBUILT_iF1800
| Weight | 1290 lbs |
|---|---|
| Pumping Speed | 1720 m3/h |
| Ultimate Pressure | 8 x 10-4 mbar |
Edwards iF1800 Semiconductor Dry Vacuum Pump - REBUILT
Edwards iH and iF system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination. We also offer repair service.
- Gas Module: controls nitrogen purges and monitors exhaust pressure.
- Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
- Electrics Module: used for low voltage power requirements.
- Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Parameter | 50 Hz | 60 Hz |
|---|---|---|
| Typical peak pumping speed | 1,720 m3h-1 | 1,800 m3h-1 |
| Typical ultimate vacuum with shaft seals purge only (50 and 60 Hz) | 8 x 10-4 mbar 0.08 Pa |
5 x 10-4 mbar 0.05 Pa |
| Maximum inlet pressure (50 and 60 Hz) | Atmospheric mbar / Pa | |
| Maximum operating time at maximum inlet pressure (50 and 60 Hz) | 60 seconds | |
| Inlet connection | ISO160 | |
| Outlet connection | NW40 | |
| Mass | 585 kg | |
| Noise level measured at 1 m from the pump (with enclosure panels fitted) | < 64 dB(A) | < 69 dB(A) |
| Warm-up time to nominal pumping performance | 15 min | |
| Minimum warm-up time to process gas pumping | 4 hours | |
| Vacuum system maximum leak-rate | 1 x 10-5 mbar l/s (1 x 10-3 Pa l/s) | |
| Exhaust system maximum leak-rate | 1 x 10-5 mbar l/s (1 x 10-3 Pa l/s) | |
| Ambient operating temperature range | 5 to 40°C | |
| Maximum ambient operating humidity | 90% RH | |
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards iF1800 - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards iF1800 Semiconductor Dry Vacuum Pump - REBUILT A53323945 / A533-23-945 200/208V 50/60Hz three-phase A53323974 / A533-23-974 440V 60Hz 3-phase A53323975 / A533-23-975