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Edwards iH1000 - REBUILT
Weight
948 lbs
Pumping Speed
950 m3 /h
Ultimate Pressure
3 x 10-2 mbar
Edwards iH1000 Semiconductor Dry Vacuum Pump - REBUILT
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Questions? send an email to our sales team!
Peak speed
950 m3 h-1
560 cfm
16,670 l/min-1
Ultimate vacuum
2 x 10-3 mbar
2 x 10-1 Pa
Typical shaft seal nitrogen flow
4 slm
Inlet connection
ISO100
Outlet connection
NW40
Typical cooling water flow at 15 psi pressure drop
240 l/h-1
4 l/min-1
Weight
430 kg
Power input at ultimate
3.8 kW
Rated motor power
6.1 kW
Oil capacity
1.48 l
All figures are typical without gas ballast.
Specifications
Type
Label
Description
Download
BOC Edwards iH Series - REBUILT
Instruction Manual
Download
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards iH1000 Semiconductor Dry Vacuum Pump - REBUILT
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A59030945 / A590-30-945 iH1000 200/208V 50/60Hz 3-phase
A59030946 / A590-30-946 iH1000 380/415V 50Hz 3-phase
A59030957 / A590-30-957 iH1000 230V 60Hz 3-phase
A53383945 / A533-83-945 iH1000 208V 60Hz
A53387945 / A533-87-945 iH1000 Enhanced 208V 60Hz
A53342945 / A533-42-945 iH1000 HEAC 208V 60Hz
A53352945 / A533-52-945 iH1000 New Look 208V 60Hz NEW LK
A59030945 / A590-30-945 iH1000 Mark V 208V 60Hz MK5
A53383946 / A533-83-946 iH1000 380/415V 50Hz
A53387946 / A533-87-946 iH1000 Enhanced 380/415V 50Hz
A53342946 / A533-42-946 iH1000 HEAC 380/415V 50Hz
A53352946 / A533-52-946 iH1000 New Look 380/415V 50Hz NEW LK
A59030946 / A590-30-946 iH1000 Mark V 380/415V 50Hz MK5
