Edwards iL70 - REBUILT
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| Weight | 506 lbs |
|---|---|
| Pumping Speed | 70 m3/h |
| Ultimate Pressure | 5 x 10-2 mbar |
Edwards iL70 Semiconductor Dry Vacuum Pump - REBUILT
The iL70 Series Dry pumps have been specifically designed to provide reliable operation over a wide range of applications. These Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iL70 Series operate under the most arduous conditions in the world's top wafer fab manufacturing plants and have been proven to require zero periodic maintenance. The iL70 series provide applications specific to the semiconductor fabrication processes. The iL70 Dry Vacuum Pumps are ideally suited to loadlock, transfer chamber, PVD, SEM and similar duties. The iL70 system has an LCDP70 dry pump and enclosed water cooled motors. This system is fully enclosed, and includes seismic restraints. A PDT, available as an accessory, enables you to manually operate the iL system and to display its status.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Peak Speed | |
| 50 Hz | 70 m3h1 / 41 cfm |
| 60 Hz | 84 m3h1 / 49 cfm |
| Ultimate vacuum | |
| 60 Hz | 2.3 x 10-2 Torr / 3 x 10-2 mbar |
| 50 Hz | 3.8 x 10-2 Torr / 5 x 10-2 mbar |
| Typical Shaft Seal | 0 |
| Inlet connection | ISO63 |
| Outlet Connection | NW40 |
| Typical cooling water flow (15 psi) | 90 1 h-1 / 1.5 1 min-1 |
| Weight | 230 kg / 506 lbs |
| Power input | |
| 60 Hz | 1.5 kW |
| 50 Hz | 1.3 kW |
| Rated motor | |
| 60 Hz | 2.2 kW |
| 50 Hz | 1.8 kW |
| Oil capacity | .75 liter |
| Type | Label | Description | Download |
|---|---|---|---|
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BOC Edwards iL Series - REBUILT | Instruction Manual | Download |
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Edwards iL70 New Look 200-208V 50/60Hz Semiconductor Dry Vacuum Pump - REBUILT