Edwards iXH1220H - REBUILT
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In stock
SKU
REBUILT_iXH1220H
| Weight | 910.5 lbs |
|---|---|
| Pumping Speed | 1,065 m3/h |
| Ultimate Pressure | 3.7 x 10-3 Torr |
Edwards iXH1220H Semiconductor Dry Vacuum Pump - REBUILT
Features include:
- More process capability
- Greatly increased powder handling capability and innova ve Gas BusterTM technology
- Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation
- Innovative pump seal technology to lengthen process life and reduce leakage risks
- High capacity dry pumps and boosters give an expanded process window to enhance yields
- Reduced cost of ownership
- 10% less energy consump on than the previous model
- SEMI® E54 compatible and Green Mode capable
- Longer overhaul intervals and less unscheduled down me
- Complies with key interna onal standards including UL, CE and S2
- Greatly increased hydrogen pumping speed for advanced EPI and solar processes
- Smaller footprint and lower height for ease of fi ng in any fab
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
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