Edwards iXH1220H - REBUILT

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In stock
SKU
REBUILT_iXH1220H
Weight 910.5 lbs
Pumping Speed 1,065 m3/h
Ultimate Pressure 3.7 x 10-3 Torr

Edwards iXH1220H Semiconductor Dry Vacuum Pump - REBUILT

Features include:

  • More process capability
  • Greatly increased powder handling capability and innova ve Gas BusterTM technology
  • Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation
  • Innovative pump seal technology to lengthen process life and reduce leakage risks
  • High capacity dry pumps and boosters give an expanded process window to enhance yields
  • Reduced cost of ownership
  • 10% less energy consump on than the previous model
  • SEMI® E54 compatible and Green Mode capable
  • Longer overhaul intervals and less unscheduled down me
  • Complies with key interna onal standards including UL, CE and S2
  • Greatly increased hydrogen pumping speed for advanced EPI and solar processes
  • Smaller footprint and lower height for ease of fi ng in any fab

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards iXH1220H Semiconductor Dry Vacuum Pump - REBUILT
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