Edwards STP-A1603C PT465Z100 - REBUILT
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| Weight | 78 lbs |
|---|---|
| Pumping Speed | 1,600 l/s |
| Ultimate Pressure | 1 x 10-9 torr |
Edwards Seiko Seiki STP-A1603C Turbomolecular Vacuum Pump - REBUILT
The small and powerful Edwards STP-A1603C turbomolecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STP-A1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.
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| Inlet flange | ISO-200F / VG200 / ICF253 |
| Outlet port | KF-40 |
| Purge port | KF-10 |
| Water cooling fitting | PT1/4 |
| Pumping Speed | |
| N2 | 1,600 l/s |
| H2 | 1,200 l/s |
| Compression ratio | |
| N2 | > 108 |
| H2 | > 7 x 103 |
| Ultimate pressure with bake out heating | 10-7 Pa (10-9 Torr) |
| Max allowable backing pressure | 266 Pa (2 Torr) |
| Max Nitrogen throughput | 2,500 sccm |
| Rated speed | 36,500 rpm |
| Starting time | 7 min |
| Mounting position | Any |
| Water cooling flow | 2 l/min-1 |
| Temperature | 5 - 25°C |
| Pressure | 0.3 MPa |
| Recommended purge gas flow | 20 - 50 sccm |
| Input voltage | 200 to 240 (± 10) VAC |
| Power consumption | 0.85 kVA |
| Pump weight | 35 kg |
| Controller weight | 9 kg |
Specs Link
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards STP Series | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards Seiko Seiki STP-A1603C Turbomolecular Vacuum Pump - REBUILT
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YT46-16-005 / YT4616005 STP-A1603CV DN 200 CF TMS 