Edwards STPH 301C - NEW
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NEW_STPH301C
| Weight | 34 lbs |
|---|---|
| Pumping Speed | 300 l/s |
| Ultimate Pressure | 1 x 10-9 Torr |
Edwards STPH 301C Turbomolecular Vacuum Pump - NEW
Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Higher gas throughput
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
5 Axis Magnetic Suspension System
- Zero contamination
- Low maintenance
- Any orientation operation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO-100K |
| Outlet port | KF-40 |
| Purge port | KF-10 |
| Water cooling fitting | PT1/4 |
| Pumping speed | |
| N2 | 300 l/s |
| H2 | 200 l/s |
| Compression ratio | |
| N2 | > 108 |
| H2 | 103 |
| Ultimate pressure w/ bake out heating | 10-7 Pa (10-9 Torr) |
| Max. continuous outlet pressure | 665 Pa (5 Torr) |
| Max. nitrogen throughput | 2,500 sccm |
| Rated speed | 48,000 rpm |
| Starting time | 4 min |
| Max inlet flange temperature | 120°C |
| Input voltage | 100 to 120 |
| Power consumption | 0.6 kVA |
| Weight | 15 kg |
| Type | Label | Description | Download |
|---|---|---|---|
|
BOC Edwards STP-301/451 Series | Instruction Manual | Download |
|
|
Edwards STP Series | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards STPH301C Turbomolecular Vacuum Pump - NEW P/N B719-01-010 / B71901010 STPH301C ISO-100K P/N YT34-0Z-004 / YT340Z004 STPH301C DN 100 CF P/N YT34-16-001 / YT3416001 STPH301CV ISO-100F TMS
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