Edwards STPH 451C - NEW

Name: Edwards STPH 451C - NEW
Brand: Edwards
SKU: NEW_STPH451C

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NEW_STPH451C

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Weight	34 lbs
Pumping Speed	450 l/s
Ultimate Pressure	1 x 10^-9 Torr

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Dimensions

Description

Edwards STPH 451C Turbomolecular Vacuum Pump - NEW

Edwards high performance STPH451C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH451C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

Higher gas throughput
Maximized process flexibility
Oil free
Low vibration
High reliability
Maintenance free
Harsh process compatible
Increased life

Advanced Controller Design

Auto tuning
Self diagnostic functions
DC motor drive
Battery-free operation

Compact Design

Small footprint
Half rack controller

5 Axis Magnetic Suspension System

Zero contamination
Low maintenance
Any orientation operation

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Specification

Inlet flange	ISO-160K
Outlet port	KF-40
Purge port	KF-10
Water cooling fitting	PT1/4
Pumping speed
N₂	450 l/s
H₂	300 l/s
Compression ratio
N₂	> 10⁸
H₂	10³
Ultimate pressure w/ bake out heating	10^-7 Pa (10^-9 Torr)
Max. continuous outlet pressure	665 Pa (5 Torr)
Max. nitrogen throughput	2,500 sccm
Rated speed	48,000 rpm
Starting time	4 min
Max inlet flange temperature	120°C
Input voltage	100 to 120
Power consumption	0.6 kVA
Weight	15 kg

Digital Manuals

Type	Label	Description	Download
	BOC Edwards STP-301/451 Series	Instruction Manual	Download
	Edwards STP Series	Instruction Manual	Download

RFQ/Configuration

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards STPH451C Turbomolecular Vacuum Pump - NEW

P/N B719-01-001 / B71901001  STPH451C  ISO-160K
P/N PT34-0Z-005 / PT340Z005  STPH451C  DN 160 CF
P/N YT34-16-007 / YT3416007  STPH451CV  ISO-160F TMS
    YT34-16-006 / YT3416006  STPH451CV  DN 160 CF TMS