MKS ENI RF 13.56 MHz - SERVICE

90 day warranty repair service and testing on most MKS ENI 13.56 MHz RF plasma power supplies.

ACG Series

• ACG-3, ACG-3B, ACG-3XL
• ACG-5, ACG-5J, ACG-5XL
• ACG-6, ACG-6B, ACG-6M5
• ACG-10, ACG-10-01, ACG-10B, ACG-10B-01, ACG-10B-02, ACG-10B-03, ACG-10B-07, ACG-10T, ACG-10XL

GHW Series

• GHW-12A, GHW-12Z
• GHW-25A, GHW-25Z, GHWE-25
• GHW-50A, GHW-50Z-07126
• GHW-55A
• GHW-58A
• GHW-85A

MW Series

• MW-5, MW-5D, MW-5DM11, MW-5D-01A, MW-5D-01B, MW-5D-01M2, MW-5D-01M5, MW-5-21021
• MW-10, MW-10D, MW-10T, MW-10-21191
• MW-25D, MW-25D-02M1, MW-25D-02M3
• MW-3513
• MWD-25LD-02, MWD-25LD-06
• MWD-55LD-01
• MWH-5-01M1, MWH-5-01M2, MWH-5-01M3
• MWH-25-04
• MWH-100-1, MWH-100-01, MWH-100-01M6
• MWM-25-02X

OEM Series

• OEM-6, OEM-6A, OEM-6B, OEM-6M
• OEM-650, OEM-650A, OEM-650A-XL
• OEM-10, OEM-10B
• OEM-12, OEM-12A, OEM-12A-XL
• OEM-12B, OEM-12B-02, OEM-12B-07, OEM-12B3, OEM-12B3-02, OEM-12B3-07, OEM-12B3-08, OEM-12L
• OEM-1250
• OEM-25, OEM-25A, OEM-25B-01, OEM-25N, OEM-25N-11481, OEM-25N-XL, OEM-25XL
• OEM-28B-02, OEM-28B-03, OEM-28B-04, OEM-28B-07, OEM-28B-08
• OEM-50, OEM-50N-11601, OEM-50N-XL
• OEM-2000

Plasmaloc Series

• PL-1HF
• PL-2HF, PL-2HF-11451, PL-2HF-11451-54, PL-2HF-11451-55
• PL-2HFN-01, PL-2HFN-1
• PL-3HF

RFC Series

• RFC-5MW
• RFC-6-01, RFC-6-02

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Questions? Please call our toll free number at 866-332-0500 or send an e-mail to our sales team!