Pfeiffer Adixen A1003XN - REBUILT

Pfeiffer Adixen A1003XN Semiconductor Dry Vacuum Pump - REBUILT

The pump is designed for applications that require the pumping of clean (dust-free) and non-corrosive gases. Examples are:

• Instrumentation
• Gas analysis
• Electronic microscope
• X-ray spectrometer
• Leak detection
• Surface analyzer
• Research and development
• Semiconductor fabrication
• Load lock and transfer chamber pumping
• Wafer back pumping

• High throughput, pumping speed 1,700 m³/h
• 3-phase motor - 200 V to 208 V, 60 Hz
• 1/4" NPT Brass water Quick Connects
• N₂ purge 20 to 120 slm
• Temperature control

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!