Pfeiffer Vacuum TSU 260 D Turbomolecular Pump System
This TSU 260 D turbo station has its backing pump mounted on a vibration-isolated baseplate. A safety valve on the backing pump shuts the pump off against the high vacuum side without delay in the event of the backing pump standstill and vents the backing pump.
When the pump is started, this valve opens with a delay. This prevents pressure surges to the high vacuum side.
The stations are water or air cooled.
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