Plasma-Therm Vacuum System Support

Plasma-ThermPlasma-Therm

PTB offers vacuum component support for your Plasma-Therm high vacuum systems:

Versaline, Singulator, Vision, Apex, Pinnacle, LAPECVD, Versalock, Mask Etcher, Odyssey, 790 PECVD RIE, VLR/SLR RIE.

Typical spares and service for Plasma-Therm high vacuum systems: