Plasma-Therm Vacuum System Support
PTB offers vacuum component support for your Plasma-Therm high vacuum systems:
Versaline, Singulator, Vision, Apex, Pinnacle, LAPECVD, Versalock, Mask Etcher, Odyssey, 790 PECVD RIE, VLR/SLR RIE.
Typical spares and service for Plasma-Therm high vacuum systems:
