VAT 64244-CE52 8" OD CF - REBUILT

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SKU
REBUILT_64244-CE52

VAT 64244-CE52 Series 642 DN 160 8" OD CF Vacuum Throttle Control Gate Valve

For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.

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Inside diameter (ID) in mm DN 160
Flange CF-F fixed flange metric threads (compatible with ISO 3669)
Body material Stainless steel
Actuator Stepper motor
Solenoid No
Position indicator No
Pressure min. 1 x 10-8 mbar
Pressure max. 2.0 bar (abs)
Feedthrough Rotary feedthrough
Sealing technology VATLOCK-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance l/s 5,000
Min. controllable conductance 1.6
Max. differential pressure closed position in bar 2
Max. pressure on seat side during opening in bar     0.03
Compressed air pressure max. in bar 7
Compressed air pressure min. in bar 4
Closing or opening time in sec. 6
Valve body temperature max. in °C 150
Actuator temperature max. in °C 50
Position Indicator temp. max. in °C 80
Weight in kg / lbs 28 / 61.73
Type Label Description Download
VAT Series 64.2, DN 160 - 400 - REBUILT Installation, Operating & Maintenance Instructions Download

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VAT Fabrication No. 64244-CE52 Series 642 DN 160 8" OD CF Vacuum Throttle Control Gate Valve