VAT 64244-CE52 8" OD CF - REBUILT
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SKU
REBUILT_64244-CE52
VAT 64244-CE52 Series 642 DN 160 8" OD CF Vacuum Throttle Control Gate Valve
For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.
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Inside diameter (ID) in mm | DN 160 |
Flange | CF-F fixed flange metric threads (compatible with ISO 3669) |
Body material | Stainless steel |
Actuator | Stepper motor |
Solenoid | No |
Position indicator | No |
Pressure min. | 1 x 10-8 mbar |
Pressure max. | 2.0 bar (abs) |
Feedthrough | Rotary feedthrough |
Sealing technology | VATLOCK-System |
Sealhead description | FKM (VITON®) |
Sealing materials | FKM (VITON®) |
Molecular flow conductance l/s | 5,000 |
Min. controllable conductance | 1.6 |
Max. differential pressure closed position in bar | 2 |
Max. pressure on seat side during opening in bar | 0.03 |
Compressed air pressure max. in bar | 7 |
Compressed air pressure min. in bar | 4 |
Closing or opening time in sec. | 6 |
Valve body temperature max. in °C | 150 |
Actuator temperature max. in °C | 50 |
Position Indicator temp. max. in °C | 80 |
Weight in kg / lbs | 28 / 61.73 |
Type | Label | Description | Download |
---|---|---|---|
VAT Series 64.2, DN 160 - 400 - REBUILT | Installation, Operating & Maintenance Instructions | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
VAT Fabrication No. 64244-CE52 Series 642 DN 160 8" OD CF Vacuum Throttle Control Gate Valve