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VAT 64246-PE52 ISO-200 - REBUILT
VAT 64246-PE52 Series 642 DN ISO-200 Vacuum Throttle Control Gate Valve
For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inside diameter (ID) in mm |
DN 200 |
| Flange |
ISO-F (compatible with ISO 1609) |
| Body material |
Stainless steel |
| Actuator |
Stepper motor |
| Solenoid |
No |
| Position indicator |
No |
| Pressure min. |
1 x 10-8 mbar |
| Pressure max. |
2.0 bar (abs) |
| Feedthrough |
Rotary feedthrough |
| Sealing technology |
VATLOCK-System |
| Sealhead description |
FKM (VITON®) |
| Sealing materials |
FKM (VITON®) |
| Molecular flow conductance l/s |
12,000 |
| Min. controllable conductance |
2 |
| Max. differential pressure closed position in bar |
2 |
| Max. pressure on seat side during opening in bar |
0.03 |
| Closing or opening time in sec. |
6 |
| Valve body temperature max. in °C |
150 |
| Actuator temperature max. in °C |
50 |
| Weight in kg / lbs |
34 / 74.96 |
| Type |
Label |
Description |
Download |
|
|
VAT Series 64.2, DN 160 - 400 - REBUILT |
Installation, Operating & Maintenance Instructions |
Download
|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
VAT Fabrication No. 64246-PE52 Series 642 DN ISO-200 Vacuum Throttle Control Gate Valve
