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VAT 65040-PH52 ISO-100 - REBUILT
VAT 65040-PH52 DN ISO-100 Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
Questions? send an email to our sales team!
Inside diameter (ID) in mm
DN 100
Flange
ISO-F (compatible with ISO 1609)
Body material
Aluminum hard anodized
Actuator
Stepper motor
Pressure min.
1 x 10-6 mbar
Pressure max.
1.2 bar (abs)
Feedthrough
Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Sealing technology
SEALRING-System
Sealhead description
FKM (VITON® )
Sealing materials
FKM (VITON® )
Molecular flow conductance l/s
1,700
Min. controllable conductance
3
Max. differential pressure closed position in bar
1.2
Max. pressure on seat side during opening in bar
0.03
Compressed air pressure max. in bar
7
Compressed air pressure min. in bar
4
Closing or opening time in sec.
3 / 4
Valve body temperature max. in °C
120
Actuator temperature max. in °C
50
Weight in kg / lbs
12 / 29.46
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
VAT Fabrication No. 65040-PH52 DN ISO-100 Vacuum Pendulum Control Valve
