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VAT 65046-PA52 ISO-200 - REBUILT
VAT 65046-PA52 DN ISO-200 Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
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Inside diameter (ID) in mm
DN 200
Flange
ISO-F (compatible with ISO 1609)
Body material
Aluminum
Actuator
Stepper motor
Pressure min.
1 x 10-8 mbar
Pressure max.
1.2 bar (abs)
Feedthrough
Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Sealing technology
SEALRING-System
Sealhead description
FKM (VITON® )
Sealing materials
FKM (VITON® )
Molecular flow conductance l/s
12,000
Min. controllable conductance
10
Max. differential pressure closed position in bar
1.2
Max. pressure on seat side during opening in bar
0.005
Compressed air pressure max. in bar
7
Compressed air pressure min. in bar
4
Closing or opening time in sec.
3 / 4
Valve body temperature max. in °C
120
Actuator temperature max. in °C
50
Weight in kg / lbs
22 / 48.5
Type
Label
Description
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VAT Series 650 - REBUILT
Installation, Operating & Maintenance Instructions
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VAT Fabrication No. 65046-PA52 DN ISO-200 Vacuum Pendulum Control Valve
