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VAT 65048-JH52 DN 250 JIS - REBUILT
VAT 65048-JH52 DN 250 JIS Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
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Inside diameter (ID) in mm
DN 250
Flange
JIS (compatible with JIS B 2290)
Body material
Aluminum hard anodized
Actuator
Stepper motor
Pressure min.
1 x 10-6 mbar
Pressure max.
1.2 bar (abs)
Feedthrough
Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Sealing technology
SEALRING-System
Sealhead description
FKM (VITON® )
Sealing materials
FKM (VITON® )
Molecular flow conductance l/s
22,000
Min. controllable conductance
15
Max. differential pressure closed position in bar
1.2
Max. pressure on seat side during opening in bar
0.005
Compressed air pressure max. in bar
7
Compressed air pressure min. in bar
4
Closing or opening time in sec.
3 / 4
Valve body temperature max. in °C
120
Actuator temperature max. in °C
50
Weight in kg / lbs
29 / 63.93
Type
Label
Description
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VAT Series 650 - REBUILT
Installation, Operating & Maintenance Instructions
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VAT Fabrication No. 65048-JH52 DN 250 Vacuum Pendulum Control Valve
