VAT 65048-JH52 DN 250 JIS - REBUILT

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VAT 65048-JH52 DN 250 JIS Vacuum Pendulum Control Valve

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.

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Inside diameter (ID) in mm DN 250
Flange JIS (compatible with JIS B 2290)
Body material Aluminum hard anodized
Actuator Stepper motor
Pressure min. 1 x 10-6 mbar
Pressure max. 1.2 bar (abs)
Feedthrough Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Sealing technology SEALRING-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance l/s 22,000
Min. controllable conductance 15
Max. differential pressure closed position in bar 1.2
Max. pressure on seat side during opening in bar     0.005
Compressed air pressure max. in bar 7
Compressed air pressure min. in bar 4
Closing or opening time in sec. 3 / 4
Valve body temperature max. in °C 120
Actuator temperature max. in °C 50
Weight in kg / lbs 29 / 63.93
Type Label Description Download
VAT Series 650 - REBUILT Installation, Operating & Maintenance Instructions Download

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VAT Fabrication No. 65048-JH52 DN 250 Vacuum Pendulum Control Valve