VAT 65048-JH52 DN 250 JIS - REBUILT
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REBUILT_65048-JH52
VAT 65048-JH52 DN 250 JIS Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
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| Inside diameter (ID) in mm | DN 250 |
| Flange | JIS (compatible with JIS B 2290) |
| Body material | Aluminum hard anodized |
| Actuator | Stepper motor |
| Pressure min. | 1 x 10-6 mbar |
| Pressure max. | 1.2 bar (abs) |
| Feedthrough | Rotary feedthrough (actuator), Shaft feedthrough (sealing ring) |
| Sealing technology | SEALRING-System |
| Sealhead description | FKM (VITON®) |
| Sealing materials | FKM (VITON®) |
| Molecular flow conductance l/s | 22,000 |
| Min. controllable conductance | 15 |
| Max. differential pressure closed position in bar | 1.2 |
| Max. pressure on seat side during opening in bar | 0.005 |
| Compressed air pressure max. in bar | 7 |
| Compressed air pressure min. in bar | 4 |
| Closing or opening time in sec. | 3 / 4 |
| Valve body temperature max. in °C | 120 |
| Actuator temperature max. in °C | 50 |
| Weight in kg / lbs | 29 / 63.93 |
| Type | Label | Description | Download |
|---|---|---|---|
|
VAT Series 650 - REBUILT | Installation, Operating & Maintenance Instructions | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
VAT Fabrication No. 65048-JH52 DN 250 Vacuum Pendulum Control Valve
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