Adixen Alcatel A100L iPUP - REBUILT
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SKU
REBUILT_A100LiPUP
| Weight | 220.5 lbs |
|---|---|
| Pumping Speed | 63 cfm |
| Ultimate Pressure | 1.2 x 10-2 mbar |
Adixen Alcatel A100L iPUP Semiconductor Dry Vacuum Pump - REBUILT
The pump is designed for applications that require the pumping of clean (dust-free) and non-corrosive gases. Examples are:
- Instrumentation
- Gas analysis
- Electronic microscope
- X-ray spectrometer
- Leak detection
- Surface analyzer
- Research and development
- Semiconductor fabrication
- Load lock and transfer chamber pumping
- Wafer back pumping
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Rotation speed | 100 Hz / 6,000 rpm |
| Peak pumping speed | 95 m3/h / 1,583 l/min / 63 cfm |
| Ultimate pressure (w/out N2 purge) | 1.2 x 10-2 mbar / 9 mTorr |
| Max. continuous inlet pressure | 50 Torr |
| Supply voltage | 200 - 208 V 3-phase 50/60Hz |
| Max. continuous power (at max. pressure) | 2.5 kW |
| Power consumption at ultimate pressure | 1.8 kW |
| Average sound level at full speed | 55 dBA |
| Guaranteed sound level at full speed | 58 dBA |
| Ambient temperature | 15 - 50°C |
| Water flow | min. 100 l/h |
| Water temperature | min. 10°C / max. 25°C |
| Gear box fluid capacity | 150 cm3 cc |
| Weight (w/out hand held display module) | 220.4 lbs / 100 kg |
| Inlet flange | DN 50 ISO-KF |
| Exhaust flange | DN 25 ISO-KF |
| Secondary exhaust port | DN 25 ISO-KF |
| Interstage flange | DN 25 ISO-KF |
| Max. exhaust flow | 13 cfm |
| Vibration level at the enclosure baseplate sidehole (4 to 400 Hz Spectrum) | |
| Acceleration | < 0.1 G |
| Displacement | < 1.5 μm |
| Speed | < 1 mm/s |
| Type | Label | Description | Download |
|---|---|---|---|
|
Alcatel IPUP A100 - REBUILT | IPUP A100 Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Adixen Alcatel A100L iPUP Semiconductor Dry Vacuum Pump - REBUILT
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