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Adixen Alcatel A100L iPUP - REBUILT
| Weight |
220.5 lbs |
| Pumping Speed |
63 cfm |
| Ultimate Pressure |
1.2 x 10-2 mbar |
|---|
Adixen Alcatel A100L iPUP Semiconductor Dry Vacuum Pump - REBUILT
The pump is designed for applications that require the pumping of clean (dust-free) and non-corrosive gases. Examples are:
- Instrumentation
- Gas analysis
- Electronic microscope
- X-ray spectrometer
- Leak detection
- Surface analyzer
- Research and development
- Semiconductor fabrication
- Load lock and transfer chamber pumping
- Wafer back pumping
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Rotation speed |
100 Hz / 6,000 rpm |
| Peak pumping speed |
95 m3/h / 1,583 l/min / 63 cfm |
| Ultimate pressure (w/out N2 purge) |
1.2 x 10-2 mbar / 9 mTorr |
| Max. continuous inlet pressure |
50 Torr |
| Supply voltage |
200 - 208 V 3-phase 50/60Hz |
| Max. continuous power (at max. pressure) |
2.5 kW |
| Power consumption at ultimate pressure |
1.8 kW |
| Average sound level at full speed |
55 dBA |
| Guaranteed sound level at full speed |
58 dBA |
| Ambient temperature |
15 - 50°C |
| Water flow |
min. 100 l/h |
| Water temperature |
min. 10°C / max. 25°C |
| Gear box fluid capacity |
150 cm3 cc |
| Weight (w/out hand held display module) |
220.4 lbs / 100 kg |
| Inlet flange |
DN 50 ISO-KF |
| Exhaust flange |
DN 25 ISO-KF |
| Secondary exhaust port |
DN 25 ISO-KF |
| Interstage flange |
DN 25 ISO-KF |
| Max. exhaust flow |
13 cfm |
| Vibration level at the enclosure baseplate sidehole (4 to 400 Hz Spectrum) |
|
| Acceleration |
< 0.1 G |
| Displacement |
< 1.5 μm |
| Speed |
< 1 mm/s |
Specifications
| Type |
Label |
Description |
Download |
|
|
Alcatel IPUP A100 - REBUILT |
IPUP A100 Instruction Manual |
Download
|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Adixen Alcatel A100L iPUP Semiconductor Dry Vacuum Pump - REBUILT
