The Turbo-V 3K-T turbomolecular pump (like Turbo-V 2K-G) is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. Additionally,it features built-in control electronics, an integrated vent and purge valve,and maintenance-free bearings. All of these assets make the Agilent Turbo-V 3K-T turbomolecular pump the optimum pumping solution for the coating industry.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
10-8 mbar (10-8 Torr) (According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a turbopump fitted with a CFF flange and using the recommended pre-vacuum pump)
Inlet flange
ISO-250F
Foreline flange
KF-40 NW
Nominal rotational speed
31,800 rpm
Start up time
< 6 minutes
Recommended forepump
At least 60 m3/h (but depending on the inlet gas flow)
Operating position
Any
Operating ambient temperature
5°C to 35°C
Max rotor temperature
120°C
Lubricant
Permanent lubrication
Cooling requirements
Water
Coolant water
Minimum flow: 200 l/h (0.89 GPM) Temperature: +10°C to +35°C Pressure: 3 to 5 bar (45 to 75 psi)
Noise level
< 60 dB(A) at 1 meter
Power supply Input voltage Input freq. Max input power Stand-by power Max operating power
208 – 240 VAC 50 – 60 Hz 950 VA 30 to 35 W 515 W for Nitrogen and lighter gases 430 W for Argon w/ purge on 390 W for Argon w/ purge on
Protection fuse
2 x 12.5 A
Compliance with
EN 55011 (Radio disturbance characteristics) EN 61000-3-2 (Limits for harmonic current emissions) EN 61000-3-3 (Limitation of voltage changes, voltage fluctuations and flicker) EN 61000-6-2 and EN 61326 (Immunity for industrial environments) which recall: EN 61000-4-2 (Electrostatic discharge phenomena) EN 61000-4-3 (Radiated high-frequency phenomena) EN 61000-4-4, EN 61000-4-5, EN61000-4-6 (Conducted high-frequency phenomena) EN 61000-4-11 (Voltage fluctuation, voltage dips and short interruptions)
Installation Category
II
Pollution Degree
2
Power cable
w/ European or NEMA plug 3 meters long (optional)
Serial communication kit
RS232 cable w/ a 9-pin D type male connector and a 9-pin D type female connector, and T-Plus software (optional)
