Agilent Turbo-V 3K-G - NEW

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NEW_TV3KG
Weight 114.64 lbs
Pumping Speed 2,200 l/s
Ultimate Pressure < 1 x 10-8 mbar

Agilent Turbo-V 3K-G Navigator Turbomolecular Vacuum Pump - NEW

The Turbo-V 3K-G turbomolecular pump (like Turbo-V 2K-G) is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. Additionally,it features built-in control electronics, an integrated vent and purge valve,and maintenance-free bearings. All of these assets make the Agilent Turbo-V 3K-G turbomolecular pump the optimum pumping solution for the coating industry.

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Pumping speed (w/out inlet screen)
    N2 2,200 l/s
    Ar 2,050 l/s
    He 1,900 l/s
Compression ratio
    N2 > 107
    Ar > 108
    He 6 x 103
Base pressure w/ recommended forepump     10-8 mbar (10-8 Torr)  (According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a turbopump fitted with a CFF flange and using the recommended pre-vacuum pump)
Inlet flange ISO-250F
Foreline flange KF-40 NW
Nominal rotational speed 31,800 rpm
Start up time < 6 minutes
Recommended forepump At least 60 m3/h (but depending on the inlet gas flow)
Operating position Any
Operating ambient temperature 5°C to 35°C
Max rotor temperature 120°C
Lubricant Permanent lubrication
Cooling requirements Water
Coolant water Minimum flow: 200 l/h (0.89 GPM)
Temperature: +10°C to +35°C
Pressure: 3 to 5 bar (45 to 75 psi)
Noise level < 60 dB(A) at 1 meter
Power supply
Input voltage
Input freq.
Max input power
Stand-by power
Max operating power

208 – 240 VAC
50 – 60 Hz
950 VA
30 to 35 W
515 W for Nitrogen and lighter gases
430 W for Argon w/ purge on
390 W for Argon w/ purge on
Protection fuse 2 x 12.5 A
Compliance with EN 55011 (Radio disturbance characteristics)
EN 61000-3-2 (Limits for harmonic current emissions)
EN 61000-3-3 (Limitation of voltage changes, voltage fluctuations and flicker)
EN 61000-6-2 and EN 61326 (Immunity for industrial environments) which recall:
EN 61000-4-2 (Electrostatic discharge phenomena)
EN 61000-4-3 (Radiated high-frequency phenomena)
EN 61000-4-4, EN 61000-4-5, EN61000-4-6 (Conducted high-frequency phenomena)
EN 61000-4-11 (Voltage fluctuation, voltage dips and short interruptions)
Installation Category II
Pollution Degree 2
Power cable w/ European or NEMA plug 3 meters long (optional)
Serial communication kit RS232 cable w/ a 9-pin D type male connector and a 9-pin D type female connector, and T-Plus software (optional)
Storage temperature -20°C to 70°C
Environment protection IP54
Weight 52 kg (114.64 lbs)

Specs

Type Label Description Download
Agilent Turbo-V 3K-G - NEW User Manual Download

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Agilent Turbo-V 3K-G Navigator Turbomolecular Vacuum Pump - NEW

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