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Agilent Varian M6 - REBUILT
| Weight |
70 lbs |
| Pumping Speed |
3178 cfm |
| Ultimate Pressure |
7 x 10-1 torr |
|---|
Agilent Varian M6 Diffusion High Vacuum Pump - REBUILT
- High pumping speed and through put in a compact design
- Fractionating jet purifies fluid
- High tolerable fore pressure
- Stainless steel body with 3 stage aluminum jet
- Full thermal protection
- Finned boiler increases surface area prolonging fluid life
- Rotatable inlet flange
- Corrosion resistant copper/nickel alloy water lines
- Foreline baffle prevents fluid loss to backing system
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Model |
M2
0189 |
M4
0187 |
M6
0188 |
| Speed (l/s) |
| Air |
175 |
800 |
1,500 |
| Hydrogen |
210 |
1,000 |
1,800 |
| Helium |
| Operating range untrapped, Torr |
2 x 10-3 to
< 5 x 10-8 |
1 x 10-3 to
< 5 x 10-9 |
| Max. fore pressure, Torr |
| No load |
0.55 |
0.65 |
0.70 |
| Full load |
0.40 |
0.45 |
0.60 |
| Max. throughput |
| @ 1 x 10-2 Torr-l/s |
0.65 |
1.5 |
2.4 |
| Min. recommended backing pump for max. throughput |
| cfm |
5 |
10 |
11 |
| Backstreaming rate at inlet flange |
| (mg/cm2/min) |
1 x 10-3 |
1 x 10-4 |
| Warmup time (min) |
10 |
12 |
| Cooldown time (min) w/ quick cool coil where applicable |
30 |
20 |
| Fluid charge |
100 cm3 |
250 cm3 |
400 cm3 |
| Electrical requirements |
1-phase |
| 50/60 Hz |
| 120/240 V |
| Power (watts) |
450 |
1,190 |
1,785 |
| Cooling water gpm @ 60 - 80°F (15 - 26) |
0.1 |
0.15 |
0.2 |
Specifications
| Type |
Label |
Description |
Download |
|
|
Varian Diffusion Pumps - REBUILT |
Data Sheet |
Download
|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Agilent Varian M6 Diffusion High Vacuum Pump - REBUILT
Type No. 0188
F8170301 / F8170-301 w/ ASA 6 in. inlet 120V
F8170306 / F8170-306 w/ ASA 6 in. inlet 208V
F8170302 / F8170-302 w/ ASA 6 in. inlet 240V
