Agilent Varian M6 - REBUILT
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In stock
SKU
REBUILT_M6
Weight | 70 lbs |
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Pumping Speed | 3178 cfm |
Ultimate Pressure | 7 x 10-1 torr |
Agilent Varian M6 Diffusion High Vacuum Pump - REBUILT
- High pumping speed and through put in a compact design
- Fractionating jet purifies fluid
- High tolerable fore pressure
- Stainless steel body with 3 stage aluminum jet
- Full thermal protection
- Finned boiler increases surface area prolonging fluid life
- Rotatable inlet flange
- Corrosion resistant copper/nickel alloy water lines
- Foreline baffle prevents fluid loss to backing system
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Model | M2 0189 |
M4 0187 |
M6 0188 |
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Speed (l/s) | |||||
Air | 175 | 800 | 1,500 | ||
Hydrogen | 210 | 1,000 | 1,800 | ||
Helium | |||||
Operating range untrapped, Torr | 2 x 10-3 to < 5 x 10-8 |
1 x 10-3 to < 5 x 10-9 |
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Max. fore pressure, Torr | |||||
No load | 0.55 | 0.65 | 0.70 | ||
Full load | 0.40 | 0.45 | 0.60 | ||
Max. throughput | |||||
@ 1 x 10-2 Torr-l/s | 0.65 | 1.5 | 2.4 | ||
Min. recommended backing pump for max. throughput | |||||
cfm | 5 | 10 | 11 | ||
Backstreaming rate at inlet flange | |||||
(mg/cm2/min) | 1 x 10-3 | 1 x 10-4 | |||
Warmup time (min) | 10 | 12 | |||
Cooldown time (min) w/ quick cool coil where applicable | 30 | 20 | |||
Fluid charge | 100 cm3 | 250 cm3 | 400 cm3 | ||
Electrical requirements | 1-phase | ||||
50/60 Hz | |||||
120/240 V | |||||
Power (watts) | 450 | 1,190 | 1,785 | ||
Cooling water gpm @ 60 - 80°F (15 - 26) | 0.1 | 0.15 | 0.2 |
Type | Label | Description | Download |
---|---|---|---|
Varian Diffusion Pumps - REBUILT | Data Sheet | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Agilent Varian M6 Diffusion High Vacuum Pump - REBUILT Type No. 0188 F8170301 / F8170-301 w/ ASA 6 in. inlet 120V F8170306 / F8170-306 w/ ASA 6 in. inlet 208V F8170302 / F8170-302 w/ ASA 6 in. inlet 240V