Agilent Varian Turbo-V 1K-G - REBUILT
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| Weight | 132 lbs |
|---|---|
| Pumping Speed | 810 - 1080 l/s |
| Ultimate Pressure | 1 x 10-10 mbar |
Agilent Varian Turbo-V TV 1K-G Turbomolecular Vacuum Pump - REBUILT
The Turbo-V 1K-G is more than a pump. It is a dedicated pumping system, designed specifically for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. Additionally, there is a possibility to drive the pump with a remote rack controller or an on-board controller. All of these assets make the Agilent Turbo-V 1K-G the optimum pumping solution for the coating industry.
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| Turbo-V 1K-G | ISO-160 | ISO-200 |
|---|---|---|
| Pumping speed (w/out inlet screen) | ||
| Ar | 750 l/s | 1,040 l/s |
| N2 | 810 l/s | 1,080 l/s |
| He | 950 l/s | 1,150 l/s |
| H2 | 680 l/s | 730 l/s |
| Compression ratio | ||
| Ar | > 5 x 108 | |
| N2 | > 5 x 107 | |
| He | > 4 x 104 | |
| H2 | > 1.5 x 104 | |
| Base pressure w/ recommended forepump | > 1 x 10-10 mbar (According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a ConFlat flange and using the recommended pre-vacuum pump) |
|
| Inlet flange | ISO-160 | ISO-200 |
| Foreline flange | KF-25 NW | KF-40 NW |
| Rotational speed | 45,660 rpm | |
| Start up time | < 5 minutes | |
| Recommended forepump | > 20 m3/h (TriScroll 600, DS 602, HS 452, HS 652) | > 36 m3/h |
| Operating position | Any | |
| Operating ambient temperature | 5°C to 35°C | |
| Bakeout temperature | 80°C at inlet flange max. (ISO flange) | |
| Vibration level (displacement) | < 0.01 μm at inlet flange | |
| Cooling requirements | Water | |
| Coolant water | Minimum flow: 200 l/h (0.89 GPM) Temperature: +10°C to +20°C Pressure: 3 to 5 bar (45 to 75 psi) |
|
| Noise level | < 45 dB(A) at 1 meter | |
| Power supply | ||
| Input voltage | 100 – 240 VAC | |
| Input freq. | 50 – 60 Hz | |
| Max input power | 600 VA | |
| Stand-by power | 30 to 35 W | |
| Max operating power | 400 W using Nitrogen or lighter gases (WATER cooling setting) 260 W using ARGON (AIR cooling setting) |
|
| Protection fuse (Navigator controller) | 1 x 6.3 A | |
| Compliance with | UNI EN 292-1 UNI EN 292-2 EN 55011Cl. A EN 61000-4-2 EN 61000-4-3 EN 61000-4-4 EN 61000-4-5 EN 61010-1 EN 1012-2 |
|
| Power cable | w/ European or NEMA plug 3 meters long (optional) | |
| Serial communication kit | RS232 cable w/ a 9-pin D type male connector and a 9- pin D type female connector, and Navigator software (optional) | |
| Installation Category | II | |
| Pollution Degree | 2 | |
| Storage temperature | -20°C to 70°C | |
| Weight | 26.8 kg (59.1 lbs) | 26.7 kg (58.9 lbs) |
| Navigator controller | 5.4 kg (12 lbs) | |
| Type | Label | Description | Download |
|---|---|---|---|
|
Agilent Turbo-V 1K-G - REBUILT | User Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Agilent Varian Turbo-V TV 1K-G Turbomolecular Vacuum Pump - REBUILT 8698961R002 / 869-8961R002 ISO-160F 8698962R001 / 869-8962R001 ISO-200F Controller 9698978M005 / 969-8978M005 9699454M002 / 969-9454M002
