Agilent Varian Turbo-V 551 SEM NAV C.U. - REBUILT

Agilent Varian Turbo-V 551 SEM NAV C.U. Onboard Turbomolecular Vacuum Pump Controller

The dedicated controller is a solid-state frequency converter which is driven by a single chip microcomputer and is composed of two PCBs which include power supply and 3-phase output, analog and input/output section, microprocessor and digital section. The power supply, together with the 3-phase output, converts the single phase AC mains supply into a 3-phase, low voltage, medium frequency output which is required to power the pump.

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