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Agilent Varian Turbo-V 81-M - ISO 63 - REBUILT
Weight
4.4 lbs
Pumping Speed
77 l/s
Ultimate Pressure
< 5 x 10-10 mbar
Agilent Varian Turbo-V 81-M/T Turbomolecular Vacuum Pump - REBUILT
Each turbo pump must match its controller in reference to the same class. For example the TV 550 pump must match a V550 (stand alone, brick or PCB) controller. We also offer repair service.
The pump consists of a high frequency motor driving a turbine fitted with 9 bladed stages and 3 Macrotorr stages. The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end. The turbine is made of high-strength aluminium alloy, machined from a single block.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Specifications
Turbo-V 81-M
Turbo-V 81-T
Pumping speed (l/s)
w/ 4.5” CF or ISO 632 : 77 l/s2 : 50 l/s
w/ 2.75” CF or KF 402 : 50 l/s2 : 46 l/s
w/ 4.5” CF or ISO 632 : 77 l/s2 : 50 l/s
w/ 2.75” CF or KF 402 : 50 l/s2 : 46 l/s
Compression ratio
N2 : 3 x 108 4 2 : 7 x 103
N2 : > 7 x 106 3 2 : 3 x 102
Base pressure (w/ recommended forepump)
5 x 10-10 mbar (3.8 x 10-10 Torr)
5 x 10-9 mbar (3.8 x 10-9 Torr)
Inlet flange
4.5” O.D. CF ISO-63
Foreline flange
KF-16 NW
Rotational speed
1,350 Hz (max)
Start-up time
< 60 seconds
Recommended forepump
Mechanical: Agilent DS 42 - DS 102 PTS 300
Operating position
Any
Cooling requirements
Natural air convection
Coolant water
flow: 10 l/h (0.05 GPM)
Operating ambient temperature w/ natural air convection
+5°C to +25°C
Operating ambient temperature w/ forced air cooling or water
+5°C to +35°C
Bakeout temperature
120°C at inlet flange max. (CF flange)
Vibration level (displacement)
< 0.01 μm at inlet flange
Noise level
≤ 45 dB (A) at 1 meter
Compliance with
UNI EN 292-1
Storage temperature
-20°C to +70°C
Input
60 VAC, three-phase
Lubricant
Permanent lubrication
Installation category
II
Pollution degree
2
Weight kg (lbs)
ISO 63: 1.99 (4.39)
ISO 63: 1.83 (4.03)
Specifications Turbo-V 81-M Specifications Turbo-V 81-T
Type
Label
Description
Download
Agilent Turbo-V 81-M - REBUILT
User Manual
Download
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Agilent Varian Turbo-V 81-M/T Turbomolecular Vacuum Pump - REBUILT
9698901 / EX9698901 / 969-8901 Turbo-V TV 81-M ISO-63
9698902 / EX9698902 / 969-8902 Turbo-V TV 81-M KF-40
9698903 / EX9698903 / 969-8903 Turbo-V TV 81-M 4.5" CF
9698904 / EX9698904 / 969-8904 Turbo-V TV 81-M 2.75" CF
9698905 / EX9698905 / 969-8905 Turbo-V TV 81-T ISO-63
9698906 / EX9698906 / 969-8906 Turbo-V TV 81-T KF-40
9698907 / EX9698907 / 969-8907 Turbo-V TV 81-T 4.5" CF
9698908 / EX9698908 / 969-8908 Turbo-V TV 81-T 2.75" CF
