Agilent TwisTorr 84 FS - NEW

Starting at $6,252
In stock
Only %1 left
Weight 4.5 lbs
Pumping Speed 67 l/s
Ultimate Pressure < 3.7x 10-10 torr

Agilent TwisTorr 84 FS Turbomolecular Vacuum Pump - NEW

The Agilent TwisTorr 84 FS turbomolecular high-vacuum pump combines TwisTorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability and economy. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension system reduces noise and vibration, and ensures optimal bearing operating conditions to extent operating life, minimize system downtime, and assure stability over time. The unique bearing and dry lubrication in the TwisTorr 84 FS eliminate oil and maintenance, and permit operation of the pump in any orientation. Available with on-board or rack controllers.

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TwisTorr 84 FS 4.5" CF 2.75" CF KF-40
Pumping speed
N2 67 l/s 56 l/s 49 l/s
He 63 l/s 46 l/s 38 l/s
H2 67 l/s 40 l/s 36 l/s
Gas throughput at full rotational speed
Air cooling (35 degrees celsius) N2: 100 sccm / Ar: 70 sccm
Water cooling (25 degrees celsius) N2: 100 sccm / Ar: 70 sccm
Compression ratio
N2 ≥ 1 x 1011
He 2 x 106
H2 5 x 104
Base pressure w/ recommended forepump < 5-10 mbar (< 3.75 x 10-10 Torr)
Inlet flange 4.5" CF / 2.75" CF / ISO-63 / KF-40
Foreline flange KF 16 NW
Rotational speed 81,000 rpm (1,350 Hz driving frequency)
Start up time < 2 minutes
Recommended forepump Mech: Agilent DS 42 - DS 102 / Dry: Agilent IDP-3
Operating position Any
+5ºC to + 35ºC Any
Operating ambient temperature +5ºC to + 35ºC
Relative humidity of air 0 - 90%
Bakeout temperature 80ºC at inlet flange max (ISO)
120ºC at inlet flange max (CFF)
Lubricant Permanent lubrication
Cooling requirements
Air cooling Air flow temperature +5ºC to +35ºC
Water cooling Cooling water temperature: +15ºC to +25ºC
Minimum flow: 65 l/h (0.30 GPM)


Type Label Description Download
Agilent TwisTorr 84 FS - NEW Instruction Manual Download

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Agilent TwisTorr 84 FS Turbomolecular Vacuum Pump - NEW

X350264000 / X3502-64000  ISO-63
X350264001 / X3502-64001  KF-40
X350264002 / X3502-64002  4.5" CF
X350264003 / X3502-64003  2.75" CF