CTI-Cryogenics On-Board IS 320FE - REBUILT

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In stock
SKU
REBUILT_OBIS320FE
Weight 100 lbs
Pumping Speed 3,600 l/s

Brooks CTI-Cryogenics On-Board IS 320FE Vacuum Cryopump - REBUILT

The acquisition of CTI from Brooks includes cryo pump operations located in Chelmsford, USA and Monterrey, Mexico, under the Edwards brand.

Call for a quote. Ask us for options you would like included e.g. a three phase motor or a Fast Regen module. We also offer one year warranty repair service. View the other On-Board IS models.

Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. The On-Board Network module is included in the price.

Features

  • Regenerates in half the time of a typical Cryo-Torr cryopump.
  • Simultaneous regeneration capability, enabled by networking your cryopumps, to speed the overall system regeneration.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Model On-Board IS 320F On-Board IS 320FE
Integrated hardware Roughing valve
Purge valve
Cryopump TC gauge
1st stage diode
2nd stage diode
1st stage heater
2nd stage heater
RS-232 interface
Pumping speeds H2O 11,000 liters/sec 11,000 liters/sec
N2 3,300 liters/sec 3,600 liters/sec
H2 9,000 liters/sec 12,500 liters/sec
Ar 2,700 liters/sec 3,000 liters/sec
Capacities H2 30 std. liters @ 5 x 10-6 Torr
Crossover 300 Torr-liters
Full Regeneration - cold to cold    
    (with 20 minutes extended purge)    
≤ 150 minutes (1 pump / 1 compressor)
≤ 150 minutes (3 pumps / 1 compressor) with TI = 100K
Fast regeneration ≤ 75 minutes (1 pump / 1 compressor)
≤ 75 minutes (3 pumps / 1 compressor) with TI = 100K
Weight 100 lbs

Specifications

Type Label Description Download
Brooks CTI-Cryogenics On-Board IS Series - REBUILT Installation Manual Download

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Brooks CTI-Cryogenics On-Board IS 320FE/FX Vacuum Cryopump - REBUILT

Please contact us for part number configurations:
8185049G001   8185059G001   8185081G001   8185082G001   8185090G001   8185102G001   8185104G001   8185105G001
8185106G001   8185122G001   8185123G001   8185134G001   8185134G002   8185134G003   8185141G001   8185161G001
8185169G001   8185169G002   8185170G001   8185171G001   8185187G001