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EBARA A70W - REBUILT
Weight |
838 lbs |
Pumping Speed |
296.64 cfm |
Ultimate Pressure |
9.75 x 10-4 torr |
EBARA A70W Multi-Stage Dry Vacuum Pump - REBUILT
Technical Characteristics
- Complete pump safeguard system
- High pump operating temperature preventing condensation
- Low noise and low vibration
- Corrosion resistant materials-stainless steel coolers, water circuits
- High reliability even for harsh processes
- Efficient interstage coolers for LPCVD nitride process
- Canned motor
- Low service requirements
- Control panel for monitoring operating conditions
Customer Benefits
- Very low nitrogen consumption for purging
- Clean room compatible
- Low service requirements
- Compact size and small footprint
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Pumping speed (N2) 50/60 Hz |
7,000 / 8,400 l/min |
Pumping speed (N2) 50/60 Hz |
420 / 504 m3/h |
Ultimate pressure 50/60 Hz |
3 x 10-3 / 1.3 x 10-3 mbar |
Ultimate pressure 50/60 Hz |
0.3 / 0.13 Pa |
Water consumption |
3.5 l/min |
Nitrogen consumption |
14-16 slm |
Nitrogen consumption |
24-27 Pa m3/sec |
Voltages ranges |
200-220/380-415 V |
Motor power, installed |
2.2+3.7 kW |
Weight, approx. |
380 kg |
Dimensions |
825 x 400 x 760 mm |
Inlet flange size |
DN 50 KF |
Outlet flange size |
DN 40 KF |
Specifications
Type |
Label |
Description |
Download |
|
EBARA A Series - REBUILT |
Instruction Manual |
Download
|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
EBARA A70W Multi-Stage Dry Vacuum Pump - REBUILT