EBARA EMT3260 Mag Lev - NEW
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| Weight | 211 lbs |
|---|---|
| Pumping Speed | 3200 cfm |
| Ultimate Pressure | < 7.5 x 10-9 torr |
EBARA EMT3260 Magnetically Levitated Turbo Vacuum Pump - NEW
The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.
The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr.
The temperature controlled model turbomolecular pumps reduce the rate condensation of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Flange | Inlet | ISO-B320 |
| Outlet | NW 40 | |
| Volume Flow Rate | N2 (l/s) | 3200 |
| N2 with protective screen | 3000 | |
| H2 (l/s) | 2700 | |
| Maximum Compression Ratio | N2 | 1x108 |
| H2 | 3x104 | |
| Ultimate Pressure CF / ISO-B | Torr | < 7.5x10-9 |
| Pa | < 1x10-6 | |
| Allowable Outlet Pressure | Torr | 3 |
| Pa | 400 | |
| Maximum Throughput | N2 (sccm) | 2000 |
| N2 (Pa x l/s) | 3680 | |
| Ar (sccm) | - | |
| Ar (Pa x l/s) | - | |
| Revolution Speed | RPM | - |
| Startup Time | Minutes | - |
| Shutdown Time | Minutes | - |
| Installation Position | Any | |
| Vibration Level (0 - peak)7 | μm | - |
| Pump Bake Out Temperature | Deg C | - |
| Bearing System | 5-axis magnetic bearing | |
| Cooling System | Water/Air | |
| Cooling Water Flow Rate | L/min | - |
| Recommended Backing pump | L/min | ≥1500 |
| N2 Gas Throughput for Purging | sscm | - |
| Pa-l/sec | - | |
| Weight ISO-B/CF | lb | 176/211 |
| kg | 80/96 | |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
EBARA EMT3260 Magnetically Levitated Turbo Vacuum Pump - NEW
