EBARA ESR20N - REBUILT
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SKU
REBUILT_ESR20N
| Weight | 200 lbs |
|---|---|
| Pumping Speed | 71 cfm |
| Ultimate Pressure | 1.5 x 10-2 Torr |
EBARA ESR20N Light Duty Dry Vacuum Pump - REBUILT
The ESR Series (Energy Saving Roots) are multistage dry vacuum pump engineered for application from clean to medium duty processes such as Load Lock, SEM, PVD, Ashing, Sputtering and Etch. The ESR Series covers a wide pumping speed range from 35 ~ 1,625 cfm with an ultimate pressure as low as 15 mTorr.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Pumping speed 50/60 Hz | 46 / 71 cfm 1,300 / 2,000 l/min 78 / 120 m3/hr |
| Ultimate pressure 50/60 Hz | 15 mTorr 2 Pa 0.02 mBar |
| Gas inlet connection | NW 40 |
| Gas outlet connection | NW 40 |
| Power at ultimate pressure | 0.55 - 0.70 kW |
| Maximum power | 2.5 kW |
| Cooling water requirements, min. flow rate | 2 l/min |
| Bearing and dilution N2, bearing seals | 0 - 12 l/min |
| Cabinet dimensions, L x W x H | 25 x 11 x 12.6 in 635 x 280 x 320 mm |
| Weight | 200 lbs 90 kg |
| Type | Label | Description | Download |
|---|---|---|---|
|
EBARA ESR Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
EBARA ESR20N Light Duty Dry Vacuum Pump - REBUILT
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