EBARA ESR80WN - REBUILT
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SKU
REBUILT_ESR80WN
| Weight | 400 lbs |
|---|---|
| Pumping Speed | 300 cfm |
| Ultimate Pressure | 1.5 x 10-3 Torr |
EBARA ESR80WN Light Duty Dry Semiconductor Vacuum Pump - REBUILT
The ESR Series (Energy Saving Roots) are multistage dry vacuum pump engineered for application from clean to medium duty processes such as Load Lock, SEM, PVD, Ashing, Sputtering and Etch. The ESR Series covers a wide pumping speed range from 35 ~ 1,625 cfm with an ultimate pressure as low as 1 mTorr.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Pumping speed 50/60 Hz | 141 / 300 cfm 4,000 / 8,500 l/min 240 / 510 m3/hr |
| Ultimate pressure 50/60 Hz | 1.5 mTorr 0.2 Pa 0.002 mBar |
| Gas inlet connection | NW 50 |
| Gas outlet connection | NW 40 |
| Power at ultimate pressure | 0.8 - 1.9 kW |
| Maximum power | 4.5 kW |
| Cooling water requirements, min. flow rate | 2 l/min |
| Bearing and dilution N2, bearing seals | 2 - 12 l/min |
| Cabinet dimensions, L x W x H | 26 x 15 x 25.8 in 660 x 380 x 655 mm |
| Weight | 400 lbs 180 kg |
| Type | Label | Description | Download |
|---|---|---|---|
|
EBARA ESR Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
EBARA ESR80WN Light Duty Dry Semiconductor Vacuum Pump - REBUILT
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