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Edwards EPX180L - REBUILT

Name: Edwards EPX180L - REBUILT
Brand: Edwards
SKU: REBUILT_EPX180L

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REBUILT_EPX180L

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Weight	96 lbs
Pumping Speed	170 m³/h
Ultimate Pressure	< 1 x 10^-4 mbar

Description

Edwards EPX180L Semiconductor Dry Vacuum Pump - REBUILT

The EPX Series offers on-tool pumping in a lighter and smaller package, requiring only 1.4 kilowatts of power. Using a unique, patented, single-shaft regenerative/ Holweck® stage mechanism, EPX pumps are capable of pumping from atmosphere to ultimate pressures of <7 x 10^-7 Torr.

Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated electronics also provide simple communication connections to the process tool.

The EPX Series supports clean and light duty semiconductor processing applications such as ash/strip and implant end station applications

Specification

Peak Speed	170 m³h^-1 / 105 ft³min^-1 / 2,835 lmin^-1
Ultimate Vacuum	< 1 x 10⁴ mbar / < 7.5 x 10^-5 / < 1 x 10^-2 Pa Torr
Warm up time (to nominal performance)	30 min
Inlet Flange	ISO63
Outlet flange	NW25
Noise	< 59 dB(A)
Water connectors	3/8 in Quick
Minimum cooling water flow rate	2 lmin^-1
Cooling water temperature	15 - 35°C
Electrical supply	200/208 V, 50/60 Hz 3-phase
Power at ultimate	1.4 kW
Rated motor power	3.0 kW
TIM	C3
Weight	43.5 kg

Digital Manuals

Type	Label	Description	Download
	Edwards EPX HiVac Series	Instruction Manual	Download

RFQ/Configuration

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards EPX180L Semiconductor Dry Vacuum Pump - REBUILT

A41941014 / A419-41-014  EPX180L  400V 3/8 water connector 
A41941132 / A419-41-132  EPX180L  208V C3 TIM 9/16 water connector 
A41941212 / A419-41-212  EPX180L  208V SPI TIM 3/8 water connector
A41941222 / A419-41-222  EPX180L  208V SPI TIM 1/4 water connector
A41941312 / A419-41-312  EPX180L  208V E73 TIM 3/8 water connector
A41941314 / A419-41-314  EPX180L  400V E73 TIM 3/8 water connectors
A41941412 / A419-41-412  EPX180L  208V TEL TIM 3/8 water connector
A41941514 / A419-41-514  EPX180L  400V LAM TIM 3/8 water connectors
A41941712 / A419-41-712  EPX180L  208V MCM TIM 3/8 water connector
A41941002 / A419-41-002  EPX180L  200V
A41941012 / A419-41-012  EPX180L  200V 3/8 water connector
A41941112 / A419-41-112  EPX180L  208V C3 TIM 3/8 water connector
A41941024 / A419-41-024  EPX180L  400V 1/4 water connector
A41941142 / A419-41-142  EPX180L  208V C3 TIM 3/8 water connector
A41941152 / A419-41-152  EPX180L  208V C3 TIM 3/8 water connector
A41941214 / A419-41-214  EPX180L  400V SPI TIM 3/8 water connector

OBSOLETED
 
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A40904977 / A409-04-977  IPX100A
A40904973 / A409-04-973  IPX100A
A40924977 / A409-24-977  IPX180A
A40924973 / A409-24-973  IPX180A
A40914977 / A409-14-977  IPX500A
A40914973 / A409-14-973  IPX500A