Edwards iGX100M - NEW

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In stock
SKU
NEW_iGX100M
Weight 264 lbs
Motor Power 1.3 hp
Pumping Speed 105 m3h-1
Ultimate Pressure 3.7x 10-3 torr

Edwards iGX100M Semiconductor Dry Vacuum Pump - NEW

The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.

iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Peak Speed 105 m3h-1 / 62 cfm
Ultimate Pressure 5.00E-03 mbar / 3.75E-03 Torr
Power at 700 Torr exhaust
Ultimate 1 kW
AUC (Active Utility Controller)     0.05 kW
Water inlet 1 slm
Nitrogen 0 slm
Footprint excluding exhaust 0.20 m2
Weight 120 kg
Inlet connectiom ISO63
Outlet connection NW25
Noise at ultimate < 55 dB(A)

Specifications

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards iGX100M Semiconductor Dry Vacuum Pump - NEW

A54612958 / A546-12-958  iGX100M  200-230V 50/60 Hz
A54612959 / A546-12-959  iGX100M  380-460V 50/60 Hz