Edwards iGX100M - REBUILT
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| Weight | 264.5 lbs |
|---|---|
| Pumping Speed | 62 cfm |
| Ultimate Pressure | 5 x 10-3 mbar |
Edwards iGX100M Semiconductor Dry Vacuum Pump - REBUILT
The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Peak speed | 105 m3h-1 |
| 62 cfm | |
| 1,750 l min-1 | |
| Ultimate pressure | 5.00E-03 mbar |
| 3.75E-03 Torr | |
| 0.50 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 1 slm |
| Nitrogen | 4 or 14 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO63 |
| Outlet connection | NW25 |
| Noise at ultimate | < 55 dB(A) |
* Requires constant flow valve accessory.
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards iGX Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
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