Edwards iGX100N - REBUILT

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In stock
Weight 264.5 lbs
Pumping Speed 62 cfm
Ultimate Pressure 5 x 10-3 mbar

Edwards iGX100N Semiconductor Dry Vacuum Pump - REBUILT

The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.

iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Peak speed  
  62 cfm
  1,750 l min-1
Ultimate pressure 5.00E-03 mbar
  3.75E-03 Torr
  0.50 Pa
Power at 700 Torr exhaust  
Ultimate 1 kW
AUC (Active Utility Controller)     0.05 kW
Water inlet* 1 slm
Nitrogen 4 or 14 slm
Footprint excluding exhaust 0.20 m2
Weight 120 kg
Inlet connection ISO63
Outlet connection NW25
Noise at ultimate < 55 dB(A)

* Requires constant flow valve accessory.


Type Label Description Download
Edwards iGX Series - REBUILT Instruction Manual Download

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards iGX100N Semiconductor Dry Vacuum Pump - REBUILT

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A54611959 / A546-11-959  iGX100N  380-460V 50/60Hz 
A54811958 / A548-11-958  iGX100N  200-230V 50/60Hz SS
A53611958 / A536-11-958  iGX100N  200-230V 50/60Hz 
A53611959 / A536-11-959  iGX100N  380-460V 50/60Hz