Edwards iGX100N - REBUILT
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| Weight | 264.5 lbs |
|---|---|
| Pumping Speed | 62 cfm |
| Ultimate Pressure | 5 x 10-3 mbar |
Edwards iGX100N Semiconductor Dry Vacuum Pump - REBUILT
The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Peak speed | |
| 62 cfm | |
| 1,750 l min-1 | |
| Ultimate pressure | 5.00E-03 mbar |
| 3.75E-03 Torr | |
| 0.50 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 1 slm |
| Nitrogen | 4 or 14 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO63 |
| Outlet connection | NW25 |
| Noise at ultimate | < 55 dB(A) |
* Requires constant flow valve accessory.
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards iGX Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards iGX100N Semiconductor Dry Vacuum Pump - REBUILT A53611958 / A536-11-958 iGX100N 200-230V 50/60Hz A54611958 / A546-11-958 iGX100N 200-230V 50/60Hz A54611959 / A546-11-959 iGX100N 380-460V 50/60Hz A54811958 / A548-11-958 iGX100N 200-230V 50/60Hz SS A53611958 / A536-11-958 iGX100N 200-230V 50/60Hz A53611959 / A536-11-959 iGX100N 380-460V 50/60Hz
