Edwards iH160 - REBUILT

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In stock
SKU
REBUILT_iH160
Weight 538 lbs
Motor Power 6.7 hp
Pumping Speed 165 m3h-1
Ultimate Pressure 7.5x 10-3 Torr

Edwards iH160 Semiconductor Dry Vacuum Pump - REBUILT

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

 

Peak speed

165 m3h-1
97 cfm
2,750 lmin-1
Ultimate vacuum 1 x 10-2 mbar
7.5 x 10-3 Torr
1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO63
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     120 lh-1
2 lmin-1
Weight 244 kg
Power input at ultimate 3.1 kW
Rated motor power 5.0 kW
Oil capacity 0.85 l

All figures are typical without gas ballast.

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards iH160 Semiconductor Dry Vacuum Pump - REBUILT

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