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Edwards iXH1210H - REBUILT

Name: Edwards iXH1210H - REBUILT
Brand: Edwards
SKU: REBUILT_iXH1210H

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SKU

REBUILT_iXH1210H

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Weight	910.5 lbs
Pumping Speed	1,065 m³/h
Ultimate Pressure	3.7 x 10^-3 Torr

Dimensions

Description

Edwards iXH1210H Semiconductor Dry Vacuum Pump - REBUILT

Features include:

More process capability
Greatly increased powder handling capability and innova ve Gas Buster^TM technology
Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation
Innovative pump seal technology to lengthen process life and reduce leakage risks
High capacity dry pumps and boosters give an expanded process window to enhance yields
Reduced cost of ownership
10% less energy consump on than the previous model
SEMI^® E54 compatible and Green Mode capable
Longer overhaul intervals and less unscheduled down me
Complies with key interna onal standards including UL, CE and S2
Greatly increased hydrogen pumping speed for advanced EPI and solar processes
Smaller footprint and lower height for ease of fi ng in any fab

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Specification

Dry pump size	100 m³/h
Booster size	1,200 m³/h
Peak speed	1,065 m³/h
Ultimate vac (typical)	3.7 x 10^-3 Torr
System power at ult.	3.9 kW
Inlet connection	ISO 100
Outlet connection	NW 40
Typical water flow	4.2 l/m
Purge flow range	22/44/60 slm
Weight	413 kg

Digital Manuals

Type	Label	Description	Download
	Edwards iXH, iXL & pXH Series - REBUILT	Instruction Manual	Download

RFQ/Configuration

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

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